内置型偏光片技术的研究进展

陶家顺; 许卫锋; 陈旭镪

doi:10.37188/CJLCD.2020-0270

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内置型偏光片技术的研究进展

显示技术与应用 | 更新时间：2021-04-02

- 内置型偏光片技术的研究进展
- Review on in-cell polarizer technology
- 液晶与显示 2021年36卷第4期页码：538-548
- 作者机构：
  
  1.南京中电熊猫平板显示科技有限公司, 江苏南京 210033
  2.南京中电熊猫液晶显示科技有限公司, 江苏南京 210033
  3.咸阳彩虹光电科技有限公司, 陕西咸阳 712000
- 作者简介：
  
  [ "陶家顺(1969-), 男, 江苏南京人, 硕士, 高级工程师, 2005年于江苏省委党校获得硕士学位, 主要从事新型显示产业战略规划和科技项目管理工作。E-mail:taojsh@ccpd.com.cn" ]
  [ "许卫锋(1982-), 男, 安徽灵璧人, 硕士, 工程师, 2007年于安徽师范大学获得硕士学位, 从事平板显示开发和规划投资工作。E-mail: xuweifeng@cecpandalcd.com.cn" ]
- 基金信息：
  
  产业前瞻与共性关键技术项目(BE2017038)
- DOI：10.37188/CJLCD.2020-0270
  中图分类号： TP394.1;TH691.9
- 收稿日期：2020-10-10，
  
  修回日期：2020-11-16，
  
  纸质出版日期：2021-04
- 稿件说明：
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陶家顺, 许卫锋, 陈旭镪. 内置型偏光片技术的研究进展[J]. 液晶与显示, 2021,36(4):538-548.

Jia-shun TAO, Wei-feng XU, Xu-qiang CHEN. Review on in-cell polarizer technology[J]. Chinese journal of liquid crystals and displays, 2021, 36(4): 538-548.
陶家顺, 许卫锋, 陈旭镪. 内置型偏光片技术的研究进展[J]. 液晶与显示, 2021,36(4):538-548. DOI： 10.37188/CJLCD.2020-0270.

Jia-shun TAO, Wei-feng XU, Xu-qiang CHEN. Review on in-cell polarizer technology[J]. Chinese journal of liquid crystals and displays, 2021, 36(4): 538-548. DOI： 10.37188/CJLCD.2020-0270.

摘要

传统偏光片技术所制备的是外置型偏光片，由于其贴附于显示屏表面，使显示器的厚度增加，透光率下降。为了满足对偏光片薄型化、高透过率、低成本以及柔性显示等要求，开发内置型偏光片成为新型显示特别是柔性显示发展的一个重要方向，其中作为内置型偏光片的主流技术的光控取向和纳米压印技术，由于其无静电、无粉尘污染、更精确可控微小区多筹取向能力以及低成本、大面积制备的优点，在显示领域备受关注。本文重点综述了近几年利用光控取向和纳米压印两种制造技术在内置偏光片中的开发与应用进展，并对目前该两种技术仍存在的问题进行了讨论，为内置偏光片的工业化生产提供思路。

Abstract

The external polarizer prepared by the traditional polarizer technology

is externally placed on the surface of the display

increasing the thickness of the display and decreasing the light transmittance. In order to meet the requirements for thinner polarizers

high transmittance and low cost

in-cell polarizers have been reported. As the mainstream technology of in-cell polarizers

photoalignment and nanoimprint technology

due to its advantages of no static electricity

no dust pollution

more precise and controllable micro-cell multi-chip orientation and low-cost large-area preparation

are introduced in the display field. To further understand the development of the in-cell polarizer. This article reviews the application of the two manufacturing technologies of photoalignment technology and nanoimprint in the in-cell polarizer and discusses the existing problems of the two technologies

which can provide ideas for the industrial production of in-cell polarizers.

关键词

Keywords

references

柯思 . 从偏光片到"拍立得"——一位发明家的路 . 世界博览 , 1986 . ( 2 ): 24 - 27 . https://www.cnki.com.cn/Article/CJFDTOTAL-BLSJ198602007.htm https://www.cnki.com.cn/Article/CJFDTOTAL-BLSJ198602007.htm .

S KE . From polarizer to "Polaroid"——the way of an inventor . World Vision , 1986 . ( 2 ): 24 - 27 . https://www.cnki.com.cn/Article/CJFDTOTAL-BLSJ198602007.htm https://www.cnki.com.cn/Article/CJFDTOTAL-BLSJ198602007.htm .

H W CHEN , G J TAN , M C LI , 等 . High contrast ratio LCD with an in-cell polarizer . SID Symposium Digest of Technical Papers , 2018 . 49 ( 1 ): 1734 - 1737 . DOI: 10.1002/sdtp.12378 http://doi.org/10.1002/sdtp.12378 .

X J ZHAO , A BERMAK , F BOUSSAID , 等 . Liquid-crystal micropolarimeter array for full Stokes polarization imaging in visible spectrum . Optics Express , 2010 . 18 ( 17 ): 17776 - 17787 . DOI: 10.1364/OE.18.017776 http://doi.org/10.1364/OE.18.017776 .

M SCHADT . Photo-alignment and patterning of liquid-crystal displays . Information Display , 1997 . 13 ( 12 ): 14 - 18 .

张万隆 , SRIVASTAVA A , ROGACH A , 等 . 半导体量子棒的光控取向技术进展 . 液晶与显示 , 2020 . 35 ( 5 ): 409 - 421 . http://cjlcd.lightpublishing.cn/thesisDetails#10.3788/YJYXS20203505.0409 http://cjlcd.lightpublishing.cn/thesisDetails#10.3788/YJYXS20203505.0409 .

W L ZHANG , A SRIVASTAVA , A ROGACH , 等 . Progress in photo-induced semiconductor quantum rods alignment . Chinese Journal of Liquid Crystals and Displays , 2020 . 35 ( 5 ): 409 - 421 . http://cjlcd.lightpublishing.cn/thesisDetails#10.3788/YJYXS20203505.0409 http://cjlcd.lightpublishing.cn/thesisDetails#10.3788/YJYXS20203505.0409 .

尹恒 , 徐鸣亚 , 项颖 , 等 . 基于手性和光控取向操控的液晶自组装微结构 . 液晶与显示 , 2020 . 35 ( 9 ): 885 - 891 . http://cjlcd.lightpublishing.cn/thesisDetails#10.37188/YJYXS20203509.0885 http://cjlcd.lightpublishing.cn/thesisDetails#10.37188/YJYXS20203509.0885 .

H YIN , M Y XU , Y XIANG , 等 . Self-assembled microstructures of liquid crystals based on chirality and photoalignment control . Chinese Journal of Liquid Crystals and Displays , 2020 . 35 ( 9 ): 885 - 891 . http://cjlcd.lightpublishing.cn/thesisDetails#10.37188/YJYXS20203509.0885 http://cjlcd.lightpublishing.cn/thesisDetails#10.37188/YJYXS20203509.0885 .

丁海兵 , 庞文宁 , 刘义保 , 等 . 液晶相位可变延迟器对光偏振态的调制 . 光子学报 , 2006 . 35 ( 9 ): 1397 - 1399 . https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200609027.htm https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200609027.htm .

B DINGH , W N PANG , Y B LIU , 等 . Photon polarization modulation with liquid crystal variable retarder . Acta Photonica Sinica , 2006 . 35 ( 9 ): 1397 - 1399 . https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200609027.htm https://www.cnki.com.cn/Article/CJFDTOTAL-GZXB200609027.htm .

V G CHIGRINOV , V M KOZENKOV , H S KWOK . Photoalignment of Liquid Crystalline Materials: Physics and Applications , 2008 .

M SCHADT , K SCHMITT , V KOZINKOV , 等 . Surface-induced parallel alignment of liquid crystals by linearly polymerized photopolymers . Japanese Journal of Applied Physics , 1992 . 31 ( 7 ): 2155 http://www.tandfonline.com/servlet/linkout?suffix=CIT0004&dbid=16&doi=10.1080%2F15421400701229909&key=10.1143%2FJJAP.31.2155 http://www.tandfonline.com/servlet/linkout?suffix=CIT0004&dbid=16&doi=10.1080%2F15421400701229909&key=10.1143%2FJJAP.31.2155 .

W M GIBBONS , P J SHANNON , S T SUN , 等 . Surface-mediated alignment of nematic liquid crystals with polarized laser light . Nature , 1991 . 351 ( 6321 ): 49 - 50 . DOI: 10.1038/351049a0 http://doi.org/10.1038/351049a0 .

J LU , S V DESHPANDE , E GULARI , 等 . Ultraviolet light induced changes in polyimide liquid-crystal alignment films . Journal of Applied Physics , 1996 . 80 ( 9 ): 5028 - 5034 . DOI: 10.1063/1.363467 http://doi.org/10.1063/1.363467 .

N KAWATSUKI , H TAKATSUKA , T YAMAMOTO , 等 . Photoregulated liquid crystal alignment on photoreactive side-chain liquid-crystalline polymer . Japanese Journal of Applied Physics , 1997 . 36 ( 10 ): 6464 - 6469 . http://pubs.acs.org/doi/abs/10.1021/ma9703315 http://pubs.acs.org/doi/abs/10.1021/ma9703315 .

H AKIYAMA , T KAWARA , H TAKADA , 等 . Synthesis and properties of azo dye aligning layers for liquid crystal cells . Liquid Crystals , 2002 . 29 ( 10 ): 1321 - 1327 . DOI: 10.1080/713935610 http://doi.org/10.1080/713935610 .

F S YEUNG , J Y HO , Y W LI , 等 . Variable liquid crystal pretilt angles by nanostructured surfaces . Applied Physics Letters , 2006 . 88 ( 5 ): 051910 DOI: 10.1063/1.2171491 http://doi.org/10.1063/1.2171491 .

V PRESNYAKOV , K ASATRYAN , T GALSTIAN , 等 . Optical polarization grating induced liquid crystal micro-structure using azo-dye command layer . Optics Express , 2006 . 14 ( 22 ): 10558 - 10564 . DOI: 10.1364/OE.14.010558 http://doi.org/10.1364/OE.14.010558 .

A MURAVSKY , A MURAUSKI , X H LI , 等 . Optical rewritable liquid-crystal-alignment technology . Journal of the Society for Information Display , 2007 . 15 ( 4 ): 267 - 273 . DOI: 10.1889/1.2723884 http://doi.org/10.1889/1.2723884 .

金在镇, 金信英, 辛富建, 等. 用于制备光控取向膜的紫外高透过双层线栅偏振片及其制备方法: 中国, 102576107A[P]. 2012-07-11.

JIN Z Z, JIN X Y, XIN F J, et al . High ultraviolet transmitting double-layer wire grid polarizer for fabricating photo-alignment layer and fabrication method thereof: CN, 102576107A[P]. 2012-07-11. (in Chinese)

马新利. 一种显示装置、曲面显示面板、内置偏光片及其制作方法: 中国, 104793281A[P]. 2015-05-13.

MA X L. Display device, curved surface display panel, built-in polaroid and manufacturing method thereof: CN, 104793281A[P]. 2015-05-13. (in Chinese)

C X ZHAO , F FAN , T DU , 等 . Multilayer photo-aligned thin-film structure for polarizing photonics . Optics Letters , 2015 . 40 ( 13 ): 2993 - 2996 . DOI: 10.1364/OL.40.002993 http://doi.org/10.1364/OL.40.002993 .

D FUJIWARA , T ISHINABE , N KOMA , 等 . Thin flexible liquid crystal displays using dye-type in-cell polarizer and PET substrates . SID Symposium Digest of Technical Papers , 2016 . 47 ( 1 ): 18 - 20 . DOI: 10.1002/sdtp.10587 http://doi.org/10.1002/sdtp.10587 .

N KOMA , M HASHIZUME , H KATO , 等 . Development of bottom emission display with excellent image visibility under bright ambient light using quantum dot color filter and in-cell polarizer . SID Symposium Digest of Technical Papers , 2018 . 49 ( 1 ): 1660 - 1663 . DOI: 10.1002/sdtp.12304 http://doi.org/10.1002/sdtp.12304 .

闫春秋, 陈黎暄, 陈珍霞. 染料偏光片的制备方法及显示面板: 中国, 107144911A[P]. 2017-09-08.

YAN C Q, CHEN L X, CHEN Z X. Dye polarizer making method and display panel: CN, 107144911A[P]. 2017-09-08. (in Chinese)

KWOK H S, KHAZIMULLIN M, CHIGRINOV V G. Mechanism of LCD photoalignment[C]// Proceedings of SPIE 4799 , Liquid Crystals VI . Seattle, WA, United States: SPIE, 2002: 160.

KWOK H S, YIP W C, CHIGRINOV V, et al . Photo-induced alignment materials and method for LCD fabrication: US, 20030072896A1[P]. 2003-04-17.

S PAN , V G CHIGRINOV , H S KWOK . High-performance coatable polarizer by photoalignment . SID Symposium Digest of Technical Papers , 2017 . 48 ( 1 ): 1866 - 1868 . DOI: 10.1002/sdtp.12054 http://doi.org/10.1002/sdtp.12054 .

Z B SUN , C L MENG , K TSENG , 等 . Broadband quarter wave plate by coating technique . SID Symposium Digest of Technical Papers , 2018 . 49 ( 1 ): 1464 - 1467 . DOI: 10.1002/sdtp.12229 http://doi.org/10.1002/sdtp.12229 .

Y K WU , J H HUANG , W W TSAI , 等 . Solution-processed vertical organic transistors fabricated by nanoimprint lithography . IEEE Electron Device Letters , 2013 . 34 ( 2 ): 313 - 315 . DOI: 10.1109/LED.2012.2235402 http://doi.org/10.1109/LED.2012.2235402 .

F T MENG , G LUO , I MAXIMOV , 等 . Fabrication and characterization of bilayer metal wire-grid polarizer using nanoimprint lithography on flexible plastic substrate . Microelectronic Engineering , 2011 . 88 ( 10 ): 3108 - 3112 . DOI: 10.1016/j.mee.2011.06.008 http://doi.org/10.1016/j.mee.2011.06.008 .

M C MCALPINE , R S FRIEDMAN , C M LIEBER . Nanoimprint lithography for hybrid plastic electronics . Nano Letters , 2003 . 3 ( 4 ): 443 - 445 . DOI: 10.1021/nl034031e http://doi.org/10.1021/nl034031e .

Q C HSU , J J HSIAO , T L HO , 等 . Fabrication of photonic crystal structures on flexible organic light-emitting diodes using nanoimprint . Microelectronic Engineering , 2012 . 91 178 - 184 . DOI: 10.1016/j.mee.2011.10.003 http://doi.org/10.1016/j.mee.2011.10.003 .

A RETOLAZA , A JUARROS , D OTADUY , 等 . Thermal-nanoimprint lithography for perylenediimide-based distributed feedback laser fabrication . Microelectronic Engineering , 2014 . 114 52 - 56 . DOI: 10.1016/j.mee.2013.09.012 http://doi.org/10.1016/j.mee.2013.09.012 .

V REBOUD , T KEHOE , J R VIVAS , 等 . Polymer photonic band-gaps fabricated by nanoimprint lithography . Photonics and Nanostructures-Fundamentals and Applications , 2012 . 10 ( 4 ): 632 - 635 . http://www.sciencedirect.com/science/article/pii/S1569441012000752 http://www.sciencedirect.com/science/article/pii/S1569441012000752 .

M OKINAKA , S I INOUE , K TSUKAGOSHI , 等 . Nonlinear optical polymer patterned by nanoimprint lithography as a photonic crystal waveguide structure . Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena , 2006 . 24 ( 1 ): 271 - 273 . http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4974745 http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4974745 .

S YOO , S CHAE , H JEONG , 等 . Direct patterning of a SiO 2 -based diffractive optical element on a lateral-type LED by using nano-imprint technology . Journal of the Korean Physical Society , 2013 . 63 ( 9 ): 1740 - 1745 . DOI: 10.3938/jkps.63.1740 http://doi.org/10.3938/jkps.63.1740 .

X H LI , J C YU , N Y LU , 等 . Confinement-induced nanocrystal alignment of conjugated polymer by the soft-stamped nanoimprint lithography . Chinese Physics B , 2015 . 24 ( 10 ): 104215 DOI: 10.1088/1674-1056/24/10/104215 http://doi.org/10.1088/1674-1056/24/10/104215 .

G M SCHMID , M MILLER , C BROOKS , 等 . Step and flash imprint lithography for manufacturing patterned media . Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena , 2009 . 27 ( 2 ): 573 - 580 . http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5130627 http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5130627 .

S Y CHOU , P R KRAUSS , P J RENSTROM . Imprint of sub-25 nm vias and trenches in polymers . Applied Physics Letters , 1995 . 67 ( 21 ): 3114 - 3116 . DOI: 10.1063/1.114851 http://doi.org/10.1063/1.114851 .

S Y CHOU , P R KRAUSS , P J RENSTROM . Imprint Lithography with 25-nanometer resolution . Science , 1996 . 272 ( 5258 ): 85 - 87 . DOI: 10.1126/science.272.5258.85 http://doi.org/10.1126/science.272.5258.85 .

G T HUANG . 10 emerging technologies that will change your world . Technology Review , 2004 . 107 ( 1 ): 32 - 34 . http://search.ebscohost.com/login.aspx?direct=true&db=aph&AN=13158618&site=ehost-live http://search.ebscohost.com/login.aspx?direct=true&db=aph&AN=13158618&site=ehost-live .

H B LAN , H Z LIU . UV-nanoimprint lithography: structure, materials and fabrication of flexible molds . Journal of Nanoscience and Nanotechnology , 2013 . 13 ( 5 ): 3145 - 3172 . DOI: 10.1166/jnn.2013.7437 http://doi.org/10.1166/jnn.2013.7437 .

H ODA , T OHTAKE , T TAKAOKA , 等 . Photoreactive chemisorbed monolayer suppressing polymer dewetting in thermal nanoimprint lithography . Langmuir , 2009 . 25 ( 12 ): 6604 - 6606 . DOI: 10.1021/la900902f http://doi.org/10.1021/la900902f .

F QIAN , Z HE , M P THELEN , 等 . A microfluidic microbial fuel cell fabricated by soft lithography . Bioresource Technology , 2011 . 102 ( 10 ): 5836 - 5840 . DOI: 10.1016/j.biortech.2011.02.095 http://doi.org/10.1016/j.biortech.2011.02.095 .

C ZHONG , A KAPETANOVIC , Y X DENG , 等 . A chitin nanofiber ink for airbrushing, replica molding, and microcontact printing of self-assembled macro-, micro-, and nanostructures . Advanced Materials , 2011 . 23 ( 41 ): 4776 - 4781 . DOI: 10.1002/adma.201102639 http://doi.org/10.1002/adma.201102639 .

T CHEN , R JORDAN , S ZAUSCHER . Dynamic microcontact printing for patterning polymer-brush microstructures . Small , 2011 . 7 ( 15 ): 2148 - 2152 . DOI: 10.1002/smll.201100354 http://doi.org/10.1002/smll.201100354 .

I R DEOLIVEIRA , S C AMICO , A G B DE LIMA , 等 . Application of calcium carbonate in resin transfer molding process: an experimental investigation . Materialwissenschaft Und Werkstofftechnik , 2015 . 46 ( 1 ): 24 - 32 . DOI: 10.1002/mawe.201400257 http://doi.org/10.1002/mawe.201400257 .

M HECKELE , T HANEMANN . Hot embossing and injection molding for micro-optical components . Geburtshilfe Und Frauenheilkunde , 2013 . 48 ( 12 ): 881 - 883 . http://spie.org/x648.xml?product_id=284110 http://spie.org/x648.xml?product_id=284110 .

S E KIM , I C KWON , H R SONG , 等 . Insight of key factors influencing tumor targeting characteristics of glycol chitosan-based nanoparticles and in vivo applications . Macromolecular Research , 2012 . 20 ( 11 ): 1109 - 1117 . DOI: 10.1007/s13233-012-0176-1 http://doi.org/10.1007/s13233-012-0176-1 .

B D GATES , Q B XU , M STEWART , 等 . New approaches to nanofabrication: molding, printing, and other techniques . Chemical Reviews , 2005 . 105 ( 4 ): 1171 - 1196 . DOI: 10.1021/cr030076o http://doi.org/10.1021/cr030076o .

R HOKARI , K KURIHARA , N TAKADA , 等 . Fine and high-aspect-ratio screen printing combined with an imprinting technique . Journal of Micromechanics and Microengineering , 2016 . 26 ( 3 ): 035005 DOI: 10.1088/0960-1317/26/3/035005 http://doi.org/10.1088/0960-1317/26/3/035005 .

W LEE , W CHOI , Y W LIM , 等 . A highly efficient organic light-emitting diode with an imprinted in-cell polarizer for backlight applications . Journal of Information Display , 2008 . 9 ( 4 ): 11 - 14 . DOI: 10.1080/15980316.2008.9652064 http://doi.org/10.1080/15980316.2008.9652064 .

LEE I H, YU E S, KIM S U, et al . Array of liquid crystal polymer-based Fabry-Perot resonators for image selection by polarization[C]// Proceedings of SPIE 9940 , Liquid Crystals XX . San Diego, California, USA: SPIE, 2016: 994003.1-994003.5.

CHUNG J, KIM D, PARK J, et al . In-cell polarizer, liquid crystal display including the same, and method of manufacturing liquid crystal display: US, 9696589[P]. 2017-07-04.

杨超群, 黄长治. 在液晶面板中内置偏光片的方法、液晶显示装置及其制作方法: 中国, 108535904A[P]. 2018-05-23.

YANG C Q, HUANG C Z. Liquid crystal display panel, method for internally installing polarizer in liquid crystal display panel and production method of liquid crystal display panel: CN, 108535904A[P]. 2018-05-23. (in Chinese)

卢马才, 姚江波, 覃事建. 金属栅偏光片及其制作方法、液晶显示器: 中国, 107884866A[P]. 2017-12-25.

LU M C, YAO J B, QIN S J. Metal gate polaroid and manufacturing method thereof, and liquid crystal display: CN, 107884866A[P]. 2017-12-25. (in Chinese)

宋德伟, 颜源, 李立胜. 金属栅偏光片及其制作方法: 中国, 108776364A[P]. 2018-11-09.

SONG D W, YAN Y, LI L S. Metal grid polarizer and its manufacturing method: CN, 108776364A[P]. 2018-11-09. (in Chinese)

侯俊. 纳米线栅偏光片的制作方法: 中国, 107203017A[P]. 2017-09-26.

HOU J.Making method of nano wire grating polarizer: CN, 107203017A[P]. 2017-09-26. (in Chinese)

王明洋. 基于纳米压印技术的微纳结构制备研究[D]. 哈尔滨: 哈尔滨工业大学, 2019.

WANG M Y. Fabrication research of micro/nano-structure based on nanoimprint lithographing[D]. Harbin: Harbin Institute of Technology, 2019. (in Chinese)

陈燕青. 金属线栅型太赫兹偏振片的制备及性能研究[D]. 福州: 福州大学, 2018.

CHEN Y Q. Preparation and properties of metal wire grid terahertz polarizers[D]. Fuzhou: Fuzhou University, 2018. (in Chinese)

刘京昀. 大面积光子晶体LED结构转移的装备设计及工艺研究[D]. 青岛: 青岛理工大学, 2014.

LIU J Y. Investigation of the processes and equipment for tranfer-molding of LED-photonic-crystal structures over large area[D]. Qingdao: Qingdao Technological University, 2014. (in Chinese)

窦晓宇. 利用纳米压印技术构筑高效的QLED器件及其出光性能研究[D]. 郑州: 河南大学, 2018.

DOU X H. Assembling and performance of high out-coupling efficiency of quantum-dots light-emitting diodes with nanostructure by nanoimprint[D]. Zhengzhou: Henan University, 2018. (in Chinese)

陈晓虹. 利用纳米压印技术构筑图案化ZnO提高反型QLED出光效率[D]. 郑州: 河南大学, 2017.

CHEN X H. Construction of patterned ZnO by nanoimprint lithograph to improve the light extraction efficiency of the inverted QLED[D]. Zhengzhou: Henan University, 2017. (in Chinese)

马航. 纳米压印法制备1, 4-双(2-甲基苯乙烯基)苯晶体的微腔阵列[D]. 长春: 吉林大学, 2016.

MA H. Organic thin films for patterned 1, 4-Bis(2-methylstyryl) benzene organic crystalline microcavity arrays via nanoprinting[D]. Changchun: Jilin University, 2016. (in Chinese)

陈鑫. 纳米压印工艺及其在光电子芯片中的应用研究[D]. 武汉: 华中科技大学, 2015.

CHEN X. The study of nanoimprint lithography and its application in the optoelectronic chip fabrication[D]. Wuhan: Huazhong University of Science & Technology, 2015. (in Chinese)

庄喆 , 刘斌 , 张荣 , 等 . 纳米压印技术在LED器件制备中的应用 . 激光与光电子学进展 , 2013 . 50 ( 2 ): 10 - 16 . https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201302001.htm https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201302001.htm .

Z ZHUANG , B LIU , R ZHANG , 等 . Application of nanoimprint lithography for the fabrication of light-emitting diodes . Laser & Optoelectronics Progress , 2013 . 50 ( 2 ): 10 - 16 . https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201302001.htm https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201302001.htm .

J Y SHAO , X L CHEN , X M LI , 等 . Nanoimprint lithography for the manufacturing of flexible electronics . Science China Technological Sciences , 2019 . 62 ( 2 ): 175 - 198 . DOI: 10.1007/s11431-018-9386-9 http://doi.org/10.1007/s11431-018-9386-9 .

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