基于自相关性和模版匹配的TFT缺陷电路重构算法

王永城; 林珊玲; 林志贤; 郭太良

doi:10.3788/YJYXS20203506.0564

您当前的位置：

首页 >

文章列表页 >

基于自相关性和模版匹配的TFT缺陷电路重构算法

图像处理 | 更新时间：2020-07-13

- 基于自相关性和模版匹配的TFT缺陷电路重构算法
- TFT defect circuit reconstruction algorithm based on autocorrelation and template matching
- 液晶与显示 2020年35卷第6期页码：564-571
- 作者机构：
  
  平板显示技术国家地方联合工程实验室, 福州大学物理与信息工程学院, 福建福州 350116
- 作者简介：
  
  [ "王永城(1995-), 男, 福建龙岩人, 硕士研究生, 2017年于福州大学获得学士学位, 主要从事机器视觉及电子纸显示的研究。E-mail:532427913@qq.com" ]
  [ "林志贤(1975-), 男, 福建泉州人, 教授, 博士, 博士生导师, 2010年于福州大学获得博士学位, 主要研究方向为信息显示技术、平板显示驱动系统及图像处理。E-mail:lzx2005000@163.com" ]
- 基金信息：
  
  国家重点研发计划资助(2016YFB0401503);广东省科技重大专项(2016B090906001);福建省科技重大专项(2014HZ0003-1);广东省光信息材料与技术重点实验室开放基金资助项目(2017B030301007)
- DOI：10.3788/YJYXS20203506.0564
  中图分类号： TP278
- 收稿日期：2019-08-30，
  
  修回日期：2019-11-12，
  
  录用日期：2019-11-12，
  
  纸质出版日期：2020-06-05
- 稿件说明：
移动端阅览
王永城, 林珊玲, 林志贤, 等. 基于自相关性和模版匹配的TFT缺陷电路重构算法[J]. 液晶与显示, 2020,35(6):564-571.

Yong-cheng WANG, Shan-ling LIN, Zhi-xian LIN, et al. TFT defect circuit reconstruction algorithm based on autocorrelation and template matching[J]. Chinese journal of liquid crystals and displays, 2020, 35(6): 564-571.
王永城, 林珊玲, 林志贤, 等. 基于自相关性和模版匹配的TFT缺陷电路重构算法[J]. 液晶与显示, 2020,35(6):564-571. DOI： 10.3788/YJYXS20203506.0564.

Yong-cheng WANG, Shan-ling LIN, Zhi-xian LIN, et al. TFT defect circuit reconstruction algorithm based on autocorrelation and template matching[J]. Chinese journal of liquid crystals and displays, 2020, 35(6): 564-571. DOI： 10.3788/YJYXS20203506.0564.

摘要

在TFT的制程中会造成许多不可避免的工艺缺陷，需要逐个判断其对TFT电路所造成的影响，这种缺陷检查方式需要大量人力且速度慢、精度低，因此，将人工识别替换成计算机自动化识别就显得尤为重要。自动识别中的一个关键部分就是将TFT电路进行定位。针对因缺陷颜色、形状、位置、大小不固定等原因导致现有图像处理算法无法准确定位出TFT电路位置的问题，本文提出基于自相关性和模版匹配的TFT电路图像重构算法。首先，对全自动光学检测(AOI)相机采集的缺陷图片进行区域提取，估算出偏角并校正图像；根据边缘图像的灰度垂直响应的自相关估计函数来估算电路的重复周期，再由周期灰度均值来确定一组的电路纵贯线位置，利用TFT电路周期特征重构出其余纵贯线；通过角模版匹配算法重构TFT电路硅岛部分。实验结果表明，本文提出的算法能够重构出被缺陷遮挡、图片模糊、电路缺失等情况下的电路，定位准确率达96%以上。基本满足TFT缺陷自动化识别中的电路定位要求。

Abstract

The TFT manufacturing process can inevitably result in a number of process defects

it is necessary to individually determine the impact caused by the defects. This defect inspection method requires a lot of manpower and slow

low accuracy. Therefore

it is especially important to replace manual recognition with computerized automatic identification. A key part in automatic identification is to locate the TFT circuit. Aiming at the problem that the existing image processing algorithms can not accurately locate the position of the TFT circuit due to the defect color

shape

position and size unfixed. This paper proposes an image reconstruction algorithm based on autocorrelation and template matching. Firstly

the region extraction is performed on the defect image acquired by the automated optical inspection(AOI) camera

and estimates the angle and corrects the image. The circuit's repetition period is estimated according to the autocorrelation estimation function of the gray-scale vertical response of the edge image

and then the periodic gray-scale mean is used to determine the position of a group of longitudinal lines

and the remaining vertical lines are reconstructed by using the periodic characteristics of the TFT circuit. Finally

the silicon island part of the TFT circuit is reconstructed by the angular template matching algorithm. The experimental results show that the proposed algorithm can reconstruct the circuit under the condition of defect occlusion

blurred picture

and missing circuit. The accuracy of positioning is over 96%. Basically

it can meet the circuit segmentation requirements in TFT defect auto-identification.

关键词

Keywords

references

田路线 , 李国富 , 吴光文 . TFT-LCD玻璃基板简介 . 玻璃 , 2009 . 36 ( 5 ): 46 - 49 . DOI: 10.3969/j.issn.1003-1987.2009.05.011 http://doi.org/10.3969/j.issn.1003-1987.2009.05.011 .

L X TIAN , G F LI , G W WU . Summary of TFT-LCD glass substrate . Glass , 2009 . 36 ( 5 ): 46 - 49 . DOI: 10.3969/j.issn.1003-1987.2009.05.011 http://doi.org/10.3969/j.issn.1003-1987.2009.05.011 .

田雨.TFT-LCD制造工艺的研究[D].武汉: 华中科技大学, 2008.

TIAN Y. The study of TFT-LCD production technics[D]. Wuhan: Huazhong University of Science and Technology, 2008. (in Chinese)

廖苗 , 刘毅志 , 欧阳军林 , 等 . 基于自适应局部增强的手机TFT-LCD屏Mura缺陷自动检测 . 液晶与显示 , 2018 . 33 ( 6 ): 475 - 482 . http://d.old.wanfangdata.com.cn/Periodical/yjyxs201806005 http://d.old.wanfangdata.com.cn/Periodical/yjyxs201806005 .

M LIAO , Y Z LIU , J L OUYANG , 等 . Automatic detection of Mura defect in TFT-LCD mobile screen based on adaptive local enhancement . Chinese Journal of Liquid Crystals and Displays , 2018 . 33 ( 6 ): 475 - 482 . http://d.old.wanfangdata.com.cn/Periodical/yjyxs201806005 http://d.old.wanfangdata.com.cn/Periodical/yjyxs201806005 .

顾鹏 , 张玉 . 改进的红外图像2维Otsu分割算法 . 中国图象图形学报 , 2011 . 16 ( 8 ): 1424 - 1428 . http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201108013 http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201108013 .

P GU , Y ZHANG . Improved 2D Otsu segmentation algorithm for infrared image . Journal of Image and Graphics , 2011 . 16 ( 8 ): 1424 - 1428 . http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201108013 http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201108013 .

黄港 , 李俊 , 潘金贵 . 基于粒子群优化方法的2维Otsu快速图像分割算法 . 中国图象图形学报 , 2011 . 16 ( 3 ): 377 - 381 . http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201103012 http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201103012 .

G HUANG , J LI , J G PAN . A fast 2D Otsu image segmentation algorithm based on particle swam optimization algorithm . Journal of Image and Graphics , 2011 . 16 ( 3 ): 377 - 381 . http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201103012 http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a201103012 .

吴一全 , 张金矿 . 改进的2维Otsu法及混沌粒子群递推的阈值分割 . 中国图象图形学报 , 2009 . 14 ( 9 ): 1843 - 1849 . http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a200909021 http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a200909021 .

Y Q WU , J K ZHANG . Thresholding based on improved 2D Otsu method and chaotic particle swarm optimization . Journal of Image and Graphics , 2009 . 14 ( 9 ): 1843 - 1849 . http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a200909021 http://d.old.wanfangdata.com.cn/Periodical/zgtxtxxb-a200909021 .

张帆 , 韩树奎 , 张立国 , 等 . Canny算法的GPU并行加速 . 中国光学 , 2017 . 10 ( 6 ): 737 - 743 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201706006 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201706006 .

F ZHANG , S K HAN , L G ZHANG , 等 . Parallel acceleration of Canny algorithm based on GPU . Chinese Optics , 2017 . 10 ( 6 ): 737 - 743 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201706006 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201706006 .

江山 , 张锐 , 韩广良 , 等 . 复杂背景灰度图像下的多特征融合运动目标跟踪 . 中国光学 , 2016 . 9 ( 3 ): 320 - 328 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201603003 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201603003 .

S JIANG , R ZHANG , G L HAN , 等 . Moving object tracking based on multi-feature fusion in the complex background gray image . Chinese Optics , 2016 . 9 ( 3 ): 320 - 328 . http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201603003 http://d.old.wanfangdata.com.cn/Periodical/zggxyyygxwz201603003 .

陶李 , 王珏 , 邹永宁 , 等 . 改进的Zernike矩工业CT图像边缘检测 . 中国光学 , 2012 . 5 ( 1 ): 48 - 56 . DOI: 10.3969/j.issn.2095-1531.2012.01.007 http://doi.org/10.3969/j.issn.2095-1531.2012.01.007 .

L TAO , J WANG , Y N ZOU , 等 . Improved Zernike moment method for industrial CT image edge detection . Chinese Optics , 2012 . 5 ( 1 ): 48 - 56 . DOI: 10.3969/j.issn.2095-1531.2012.01.007 http://doi.org/10.3969/j.issn.2095-1531.2012.01.007 .

韩思奇 , 王蕾 . 图像分割的阈值法综述 . 系统工程与电子技术 , 2002 . 24 ( 6 ): 91 - 94, 102 . DOI: 10.3321/j.issn:1001-506X.2002.06.027 http://doi.org/10.3321/j.issn:1001-506X.2002.06.027 .

S Q HAN , L WANG . A survey of thresholding methods for image segmentation . Systems Engineering and Electronics , 2002 . 24 ( 6 ): 91 - 94, 102 . DOI: 10.3321/j.issn:1001-506X.2002.06.027 http://doi.org/10.3321/j.issn:1001-506X.2002.06.027 .

李梅.基于Otsu算法的图像分割研究[D].合肥: 合肥工业大学, 2011.

LIN M. Research of image segmentation based on Otsu algorithm[D]. Hefei: Hefei University of Technology, 2011. (in Chinese)

N OTSU . A threshold selection method from gray-level histograms . IEEE Transactions on Systems. Man. and Cybernetics , 1979 . 9 ( 1 ): 62 - 66 . DOI: 10.1109/TSMC.1979.4310076 http://doi.org/10.1109/TSMC.1979.4310076 .

周燕琴 , 吕绪洋 . 基于改进K-均值与分水岭算法的医学图像分割 . 软件导刊 , 2016 . 15 ( 3 ): 172 - 174 . http://d.old.wanfangdata.com.cn/Periodical/rjdk201603058 http://d.old.wanfangdata.com.cn/Periodical/rjdk201603058 .

Q Y ZHOU , X Y LV . Medical image segmentation based on improved K-means and watershed algorithm . Software Guide , 2016 . 15 ( 3 ): 172 - 174 . http://d.old.wanfangdata.com.cn/Periodical/rjdk201603058 http://d.old.wanfangdata.com.cn/Periodical/rjdk201603058 .

朱莉玲 . 数字图像处理技术与应用研究 . 信息系统工程 , 2016 . ( 4 ): 84 DOI: 10.3969/j.issn.1001-2362.2016.04.067 http://doi.org/10.3969/j.issn.1001-2362.2016.04.067 .

L L ZHU . Digital image processing technology and application research . Information Systems Engineering , 2016 . ( 4 ): 84 DOI: 10.3969/j.issn.1001-2362.2016.04.067 http://doi.org/10.3969/j.issn.1001-2362.2016.04.067 .

伊力哈木·亚尔买买提 . 基于改进的自适应分水岭图像分割方法研究 . 计算机仿真 , 2013 . 30 ( 2 ): 373 - 377, 405 . DOI: 10.3969/j.issn.1006-9348.2013.02.086 http://doi.org/10.3969/j.issn.1006-9348.2013.02.086 .

YILIHAMU·YAERMAIMAITI . Based on the improved adaptive watershed image segmentation method research . Computer Simulation , 2013 . 30 ( 2 ): 373 - 377, 405 . DOI: 10.3969/j.issn.1006-9348.2013.02.086 http://doi.org/10.3969/j.issn.1006-9348.2013.02.086 .

D L B JUPP , A H STRAHLER , C E WOODCOCK . Autocorrelation and regularization in digital images. I. Basic theory . IEEE Transactions on Geoscience and Remote Sensing , 1988 . 26 ( 4 ): 463 - 473 . DOI: 10.1109/36.3050 http://doi.org/10.1109/36.3050 .

COBB J T, PRINCIPE J. Autocorrelation features for synthetic aperture sonar image seabed segmentation[C]// Proceedings of 2011 IEEE International Conference on Systems. Man. and Cybernetics . Anchorage: IEEE, 2011.

唐琎 , 李青 . 一种快速的模板匹配算法 . 计算机应用 , 2010 . 30 ( 6 ): 1559 - 1561, 1564 . http://d.old.wanfangdata.com.cn/Periodical/jsjyy201006038 http://d.old.wanfangdata.com.cn/Periodical/jsjyy201006038 .

J TANG , Q LI . Fast template matching algorithm . Journal of Computer Applications , 2010 . 30 ( 6 ): 1559 - 1561, 1564 . http://d.old.wanfangdata.com.cn/Periodical/jsjyy201006038 http://d.old.wanfangdata.com.cn/Periodical/jsjyy201006038 .

邹广华.基于几何特征的快速模板匹配算法[D].哈尔滨: 哈尔滨工业大学, 2010.

ZOU G H. Fast template matching based on geometric features[D]. Harbin: Harbin Institute of Technology, 2010. (in Chinese)

BRIECHLE K, HANEBECK U D. Template matching using fast normalized cross correlation[C]// Proceedings of SPIE, Optical Pattern Recognition XⅡ . Orlando, FL, United States: SPIE, 2001, 4387: 95-102.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

基于边缘增强和特征融合的伪装目标分割

基于图像分割的点云去噪方法

基于NODE-UNet++和标记分水岭算法的红细胞图像分割

一种应用相机阵列实现图像遮挡物移除的方法

自适应动态肤色检测技术研究进展