高分辨率平板电脑产品中彩膜曝光基台色斑不良的改善

蒋迁; 塔拉; 薛凤明; 章旭; 孟令剑; 王昆; 周鹏; 王旭

doi:10.3788/YJYXS20193406.0537

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高分辨率平板电脑产品中彩膜曝光基台色斑不良的改善

材料与器件 | 更新时间：2020-07-05

- 高分辨率平板电脑产品中彩膜曝光基台色斑不良的改善
- Improvement of stage Mura in high PPI TPC color filter products
- 液晶与显示 2019年34卷第6期页码：537-542
- 作者机构：
  
  北京京东方显示技术有限公司, 北京 100176
- 作者简介：
  
  [ "蒋迁(1989-), 女, 湖北孝感人, 硕士, 2014年于中国科学院宁波材料技术与工程研究所获得硕士学位, 主要从事液晶显示面板彩膜的生产和工艺相关工作。E-mail:jiangqian@boe.com.cn" ]
- 基金信息：
- DOI：10.3788/YJYXS20193406.0537
  中图分类号： TN27
- 收稿日期：2018-12-28，
  
  录用日期：2019-4-26，
  
  纸质出版日期：2019-06-05
- 稿件说明：
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蒋迁, 塔拉, 薛凤明, 等. 高分辨率平板电脑产品中彩膜曝光基台色斑不良的改善[J]. 液晶与显示, 2019,34(6):537-542.

Qian JIANG, La TA, Feng-ming XUE, et al. Improvement of stage Mura in high PPI TPC color filter products[J]. Chinese journal of liquid crystals and displays, 2019, 34(6): 537-542.
蒋迁, 塔拉, 薛凤明, 等. 高分辨率平板电脑产品中彩膜曝光基台色斑不良的改善[J]. 液晶与显示, 2019,34(6):537-542. DOI： 10.3788/YJYXS20193406.0537.

Qian JIANG, La TA, Feng-ming XUE, et al. Improvement of stage Mura in high PPI TPC color filter products[J]. Chinese journal of liquid crystals and displays, 2019, 34(6): 537-542. DOI： 10.3788/YJYXS20193406.0537.

摘要

针对彩膜小尺寸高分辨率平板电脑产品的曝光基台色斑（Stage Mura）不良，对异常区域各项特性进行分析，发现Mura区域的黑矩阵（BM）的关键线宽（CD）和坡度角形貌与正常区存在异常。推测原因为曝光时，不良区域与正常区域曝光温度和曝光间隙存在差异，并进行试验验证。将曝光温度和曝光间隙进行调整试验后，使用扫描电子显微镜（SEM）分析黑矩阵关键线宽（BM CD）和坡度角，确认改善措施能减少正常区域和Mura区域BM CD和坡度角差异，不良发生率由7.2%降低为1.4%。进一步调整BM膜厚，从整体上弱化正常区域和Mura区域的透过率差异，最终基台色斑不良率降低至0.7%。

Abstract

As for the exposure stage Mura in small size and high PPI(Pixel Per Inch) TPC(Tablet Personal Computer) color filter product

it was found that the black matrix(BM) critical dimension(CD) and tape angle in Mura area are different from good area through the characteristic analysis. The reasons were supposed to be the difference of the temperature and gap between Mura area and good area during exposure process and were verified through experiments. After adjusting the exposure temperature and gap

the BM CD and Tape Angle were observed by scanning electron microscope(SEM) and it was found the difference between Mura area and good area were diminished. The stage Mura defect ratio decreases from 7.2% to 1.4% by the adjustment. Furthermore

to diminish the transmittance gap between Mura area and good area in general

the BM thickness is adjusted and the stage Mura defect ratio decreases to 0.6% finally.

关键词

Keywords

references

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