ITO退火工艺对HADS型TFT-LCD透过率的影响

安晖; 操彬彬; 栗芳芳; 叶成枝; 杨增乾; 彭俊林; 刘增利; 吕艳明; 陆相晚; 张敏; 陈婷婷; 金珍; 向康; 金镇满; 李恒滨

doi:10.3788/YJYXS20193405.0482

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ITO退火工艺对HADS型TFT-LCD透过率的影响

材料与器件 | 更新时间：2020-07-05

- ITO退火工艺对HADS型TFT-LCD透过率的影响
- Influence of ITO anneal on the transmittance property of HADS TFT-LCD
- 液晶与显示 2019年34卷第5期页码：482-488
- 作者机构：
  
  合肥鑫晟光电科技有限公司, 安徽合肥 230001
- 作者简介：
  
  [ "安晖(1986-), 男, 安徽淮南人, 硕士, 工程师, 2011年于中国科学院固体物理研究所获得硕士学位, 主要从事液晶显示器相关的技术研发工作。E-mail:anhui@boe.com.cn" ]
- 基金信息：
- DOI：10.3788/YJYXS20193405.0482
  中图分类号： TN873.93;TH691.9
- 收稿日期：2018-12-25，
  
  录用日期：2019-2-25，
  
  纸质出版日期：2019-05
- 稿件说明：
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安晖, 操彬彬, 栗芳芳, 等. ITO退火工艺对HADS型TFT-LCD透过率的影响[J]. 液晶与显示, 2019,34(5):482-488.

Hui AN, Bin-bin CAO, Fang-fang LI, et al. Influence of ITO anneal on the transmittance property of HADS TFT-LCD[J]. Chinese journal of liquid crystals and displays, 2019, 34(5): 482-488.
安晖, 操彬彬, 栗芳芳, 等. ITO退火工艺对HADS型TFT-LCD透过率的影响[J]. 液晶与显示, 2019,34(5):482-488. DOI： 10.3788/YJYXS20193405.0482.

Hui AN, Bin-bin CAO, Fang-fang LI, et al. Influence of ITO anneal on the transmittance property of HADS TFT-LCD[J]. Chinese journal of liquid crystals and displays, 2019, 34(5): 482-488. DOI： 10.3788/YJYXS20193405.0482.

摘要

HADS型TFT基板制程中通常存在两次ITO退火工艺，而Cell制程中则存在相似的配向膜高温烘焙工艺。为提升TFT产线退火工序的产能，因此考虑对ITO退火进行时间上的缩减甚至直接省略，然后利用配向膜烘焙的热处理对前层ITO的结晶进行补偿，但ITO结晶方式的变化还需确保产品高透过率特性。对比实验的结果表明：单层ITO退火时间由30 min缩减至10 min时，产品的透过率基本保持不变；2nd ITO退火直接省略时产品仍具备高的透过率特性，但1st ITO退火省略时产品的透过率则会大幅降低，其主要原因是钝化绝缘层的阻隔导致了1st ITO中的亚氧化物无法被后工段的热处理所氧化，而配向膜涂覆后的2nd ITO在烘焙过程中仍可以与外界高温空气结合反应。在确保产品高透过率的前提下，选择从源头上减少了1st ITO内亚氧化物的产生，通过增加1st ITO成膜时的氧气流量也可以实现1st ITO退火的直接省略。最终两次ITO退火均可被配向膜烘焙所替代且产品兼具高透过率特性，最大化地提升了TFT产线的生产效率。

Abstract

This paper makes a research on the relationship of ITO anneal to the transmittance of HADS TFT-LCD

which based on polyimide oven to replace ITO anneal for manufacturing efficiency enhancement. The result shows that 1st ITO and 2nd ITO anneal process with a shorter operation time

for example

10 min makes the same level of transmittance as the normal case of 30 min. Furthermore

the 2nd ITO anneal skip process can also maintain a high-level transmittance

because the air infiltration through polyimide can oxidate the 2nd ITO well during the oven process. However

the 1st ITO anneal skip process leads to a significant transmittance decrease due to the dense passivation

which prevents the 1st ITO from being oxidated by polyimide oven/2nd ITO anneal. Based on this reason

the oxygen reactant gas during 1st ITO sputtering is increased to produce less suboxide

which has an effect similar to the oxidation of anneal

and thus a high-level transmittance of 1st ITO skip process is observed after polyimide oven. Therefore

1st ITO anneal can be skipped as well as 2nd ITO anneal

which can greatly improve the manufacturing efficiency.

关键词

Keywords

references

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