光刻制程参数对光刻胶DICD和锥角的影响

刘丹; 陈启超; 黄晟; 秦刚; 高朋朋; 陈昊; 蔡晓锐; 王百强; 冯家海; 方亮

doi:10.3788/YJYXS20193402.0146

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光刻制程参数对光刻胶DICD和锥角的影响

材料与器件 | 更新时间：2020-07-05

- 光刻制程参数对光刻胶DICD和锥角的影响
- Influence of lithography process parameter on DICD and taper of photoresist
- 液晶与显示 2019年34卷第2期页码：146-154
- 作者机构：
  
  1.重庆京东方光电科技有限公司, 重庆 400700
  2.重庆大学物理学院, 重庆 400044
- 作者简介：
  
  [ "刘丹(1988-), 男, 重庆忠县人, 硕士, 高级工程师, 美国项目管理协会PMP, 工信部可靠性工程师, 2014年于四川大学取得硕士学位, 主要从事光刻、刻蚀等方面工作。E-mail:liudan_cq@boe.com.cn" ]
  [ "方亮(1968-), 男, 四川乐山人, 教授, 博士生导师, 教育部新世纪优秀人才, 重庆市表面工程学会副理事长, 重庆市材料学会常务理事, 主要研究方向为光电薄膜材料与器件、纳米储能新材料、耐磨耐蚀表面处理技术、半导体照明。E-mail:lfang@cqu.edu.cn" ]
- 基金信息：
- DOI：10.3788/YJYXS20193402.0146
  中图分类号： TN141.9;TP394.1
- 收稿日期：2018-08-13，
  
  录用日期：2018-11-14，
  
  纸质出版日期：2019-02-05
- 稿件说明：
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刘丹, 陈启超, 黄晟, 等. 光刻制程参数对光刻胶DICD和锥角的影响[J]. 液晶与显示, 2019,34(2):146-154.

Dan LIU, Qi-chao CHEN, Sheng HUANG, et al. Influence of lithography process parameter on DICD and taper of photoresist[J]. Chinese journal of liquid crystals and displays, 2019, 34(2): 146-154.
刘丹, 陈启超, 黄晟, 等. 光刻制程参数对光刻胶DICD和锥角的影响[J]. 液晶与显示, 2019,34(2):146-154. DOI： 10.3788/YJYXS20193402.0146.

Dan LIU, Qi-chao CHEN, Sheng HUANG, et al. Influence of lithography process parameter on DICD and taper of photoresist[J]. Chinese journal of liquid crystals and displays, 2019, 34(2): 146-154. DOI： 10.3788/YJYXS20193402.0146.

摘要

光刻胶经过曝光、显影后的锥角（Taper）和关键尺寸（Develop Inspection Critical Dimension，DICD）是光刻工艺的重要参数。明确影响锥角和DICD的工艺参数，进而控制锥角和DICD，这对工艺制程至关重要。本文结合光刻制程，探究了光刻胶厚度、曝光剂量、

值、显影时间对锥角和DICD的影响，并结合蒙特卡罗算法对显影制程进行评估。实验结果表明：光刻胶厚度每增加1

m，DICD增加约2.6

m。同时，厚度增加会导致光刻胶顶部的锥角逐渐由锐角向钝角演变。曝光剂量每增加10 mJ/s，DICD则减小约0.8

m，锥角则呈阈值跳跃式上升趋势。基板在最佳焦平面曝光，DICD和锥角均一性最好。显影时间每增加10 s，DICD下降约0.3 m，锥角则增加约1.7°。最终，DICD和锥角呈负相关关系，可以通过调节光刻工艺参数对锥角和DICD进行控制。

Abstract

The Taper and DICD(Develop inspection critical dimension) after exposure and development are important parameters in lithography process

which determine the TFT pattern and TFT characteristic. Therefore

it is necessary to identify the process parameters affecting Taper and DICD in mass production

aiming at making Taper and DICD under control

which would improve production yield. In this paper

the effects of photo resist thickness

dose and

value in exposure

development time were comprehensively studied. What's more

Monte Carlo algorithm was used to evaluate the development process. The experimental results show that photo resist thickness increases by about 1

DICD will increase by about 2.6

m. At the same time

the increase in photo-resist thickness causes the taper on the top of photoresist gradually to evolve from an acute angle to an obtuse angle. For every 10 mJ/s increase in exposure dose

DICD is reduced by about 0.8

and taper rise in a threshold. The uniformity of DICD and taper is the best when the substrate is exposed at the best focal plane. For every 10 s increase in development time

the DICD decreases by about 0.3

m and the Taper increase by about 1.7°. In the end

DICD and Taper are negatively correlated

it is possible to make profile and CD Bias under control by adjusting the process parameters.

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Keywords

references

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