适合产业化的显示屏化学减薄工艺的研究

李世宁; 邹凤君; 王丽娟; 何维威; 闫闯; 黄普林; 孙洋; 孙丽晶

doi:10.3788/YJYXS20163101.0052

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适合产业化的显示屏化学减薄工艺的研究

材料与器件 | 更新时间：2020-08-12

- 适合产业化的显示屏化学减薄工艺的研究
- Research on display panel chemical slimming process for industrialization
- 液晶与显示 2016年31卷第1期页码：52-57
- 作者机构：
  
  1. 长春工业大学化学工程学院,吉林长春,130012
  2. 长春工业大学基础科学学院,吉林长春,130012
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.21403016)();长春工业大学大学生创新创业训练计划项目(No.2015cxcy102)()
- DOI：10.3788/YJYXS20163101.0052
  中图分类号： TN27
- 收稿日期：2015-05-19，
  
  修回日期：2015-08-17，
  
  纸质出版日期：2016-01-05
- 稿件说明：
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李世宁, 邹凤君, 王丽娟等. 适合产业化的显示屏化学减薄工艺的研究[J]. 液晶与显示, 2016,31(1): 52-57

LI Shi-ning, ZOU Feng-jun, WANG Li-juan etc. Research on display panel chemical slimming process for industrialization[J]. , 2016,31(1): 52-57
李世宁, 邹凤君, 王丽娟等. 适合产业化的显示屏化学减薄工艺的研究[J]. 液晶与显示, 2016,31(1): 52-57 DOI： 10.3788/YJYXS20163101.0052.

LI Shi-ning, ZOU Feng-jun, WANG Li-juan etc. Research on display panel chemical slimming process for industrialization[J]. , 2016,31(1): 52-57 DOI： 10.3788/YJYXS20163101.0052.

摘要

超薄显示技术已成为市场的一种主流趋势。本文利用刻蚀后清洗的间歇式工艺研究了显示屏半成品的化学减薄。在光刻胶和边框胶保护下

调整氢氟酸浓度

加入一定量的硝酸、浓硫酸和盐酸

并添加超声辅助条件

刻蚀速率明显提高。通过交替的清洗工艺有效地降低了表面粗糙度

并减少了表面白色附着物的沉淀。显示屏厚度从0.8 mm减薄到0.3 mm

基板表面粗糙度为11.32 nm

厚度均匀性为4.76%。设计的间歇式减薄工艺可以应用到现有的显示屏生产工艺中

为制作超薄液晶显示屏和超薄有机发光显示屏提供了一条可行的方案。

Abstract

Ultra-slim display has been a trend in the market. The chemical slimming of semi-finished display panels was studied by the alternation process of etching and cleaning. Under the protection of photoresist and sealant

the etching rate was effectively improved by adjusting HF concentration

adding a certain amount of nitric acid

hydrochloric acid

sulphuric acid

and increasing ultrasonic intensity. The surface roughness and the precipitation of white adhesive matter on the surface were effectively reduced by alternative cleaning process. The thickness of display panel decreased from 0.8 mm to 0.3 mm

the substrate surface roughness reached to 11.32 nm

and the thickness uniformity was 4.26%. The intermittent slimming process can be applied to the present production process of display panels

and provides a practical plan for producing ultra-slim liquid crystal display panels and ultra-slim organic light emitting display panels.

关键词

Keywords

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