谢振宇. A-Si TFT用氮化硅薄膜的制备及其性能研究[D].成都:电子科技大学,2007, 10:31-33. Xie Z Y. A - Si TFT made with thinfilm of silicon nitride and researched its properties[D]. Chengdu:University of electronic Science and Technology, 2007, 10:31-33.(in Chinese)[2] 陶涛,苏辉,谢自力,等.PECVD法氮化硅薄膜生长工艺的研究[J].微纳电子技术,2010, 19(5):223-228. Tao T, Su H, Xie Z L,et al. The research of growth process technique of Silicon nitride by PECVD[J]. Journal of Micro-nano Electronic Technology, 2010, 19(5):223-228.(in Chinese)[3] 张晓情,李沛林,王敬松,等. PECVD淀积Si3N4作为光刻掩膜版的保护膜[J].半导体技术,2009, 13:123-127. ZhangX Q, Li P L, Wang J S,et al. Si3N4 deposition by PECVD as the protective film of photolithography mask version[J].Semiconductor technology, 2009, 13:123-127.(in Chinese)[4] 翟军华,苏通.液晶面板制造业中制造执行系统的设计与实现[J].液晶与显示,2014, 29(3):60-64. ZHAI J H, Su T. Design and implementation of manufacturing execution system for TFT LCD manufacturing enterprises[J]. Chinese Journal of Liquid Crystals and Displays, 2014, 29(3):60-64.(in Chinese)[5] 王卫刚,周炳海.快速换模技术的实践研究[J].机床与液压,2007, 15(5):235-240. Wang W G, Zhou B H. The practice research of the fast changing mould technology[J]. Journal of Machine Tools and Hydraulic, 2007, 15(5):235-240.(in Chinese)[6] 姜波.真空检漏在维修中的应用[J].机械制造,2006, 17(3):323-330. Jiang B. The application of vacuum leak detected in maintenance[J]. Journal of Mechanical Manufacturing, 2006, 17(4):323-330.(in Chinese)[7] 唐柱才.冲击载荷下结构动态屈曲的数值研究[D].大连:大连理工大学,2004, 16(4):189-192. Tang Z.The dynamic buckling numerical studies of the structure under impact load[D]. Dalian:Dalian university of technology, 2004, 16(4):189-192.(in Chinese)[8] 刘洋.平板式PECVD设备布气系统的分析和优化[D].沈阳:东北大学,2009:64-67. Liu Y. The analysis and optimization for the gas system of the plate type PECVD equipment[D]. Shenyang:Northeastern university, 2009:64-67.(in Chinese)[9] 陈素君,杨静.真空镀膜设备真空系统主泵的配置[C].真空工程学术交流会,2009, 33:156-163. Chen S J, Yang J. The configuration of main pump of vacuum system for vacuum coating equipment[C]. Vacuum Engineering Academic Communication, 2009, 33:156-163. (in Chinese)[10] 陈素君.真空镀膜设备抽气系统的性能要求及主泵的选择[D].中国真空学会第六届全国会员代表大会暨学术会议论文摘要集,2004, 13:156-163. Chen S J. The performance requirements of extraction system for vacuum coating equipment and the selection of main pump.[C]. Member of Chinese vacuum society the sixth national congress and academic conference paper sets of, 2004, 13:156-163. (in Chinese)[11] 闫建云,张俊锋,李邵亮.介绍一种新型真空阀[J].中国铸造装备与技术,2007, 9:117-119. Yan J Y, Zhang J F, Li S L. The introduction of a new type of vacuum valves[J]. China Casting Equipment and Technology, 2007, 9:117-119.(in Chinese)[12] 陈同沛.新型的真空阀门与真空零部件[J].真空与低温,1988, 18(5):170-173. Chen T P. New types of vacuum valves and components[J]. Journal of Vacuum and Low Temperature, 1988, 18(5):170-173.(in Chinese)