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北京京东方显示技术有限公司 北京,中国,100176
收稿日期:2014-12-15,
修回日期:2015-01-27,
网络出版日期:2015-02-02,
纸质出版日期:2015-08-05
移动端阅览
侯清娜, 张新宇, 王峥, 林鸿涛, 冯兰, 刘冬. 分析TFT亮态漏电流影响因素的测试方法[J]. 液晶与显示, 2015,30(4): 628-633
HOU Qing-na, ZHANG Xin-yu, WANG Zheng, LIN Hong-tao, FENG Lan, LIU Dong. Method for analyzing influence factors in photo off-leakage current for TFT[J]. , 2015,30(4): 628-633
侯清娜, 张新宇, 王峥, 林鸿涛, 冯兰, 刘冬. 分析TFT亮态漏电流影响因素的测试方法[J]. 液晶与显示, 2015,30(4): 628-633 DOI: 10.3788/YJYXS20153004.0628.
HOU Qing-na, ZHANG Xin-yu, WANG Zheng, LIN Hong-tao, FENG Lan, LIU Dong. Method for analyzing influence factors in photo off-leakage current for TFT[J]. , 2015,30(4): 628-633 DOI: 10.3788/YJYXS20153004.0628.
对于薄膜晶体管液晶显示器来说
TFT 的特性对产品的品质有很大的影响
而其亮态漏电流I
off
的影响尤为重要。为改善器件性能
需要深入分析TFT 亮态漏电流的影响因素。本文在实验基础上提出一种测试方法
首先使用BM PR(Black Matrix Photo Resist) 对TFT 沟道的不同位置进行遮挡;再对遮挡样品进行TFT 特性测试。进而能模拟出实际工作中的TFT 亮态漏电流
可以更加简便有效地优化TFT 下方的栅极金属线宽
同时降低亮态漏电流。最后制作了54.6 cm(21.5 in)改善样品
通过新测试方法分析
将栅极金属线加宽约1.5 m
改善后样品的亮态漏电流从14.08 pA降至约9.50 pA。所以
使用新的测试方法无需将样品制作到模组后再进行品质评价
简单有效并降低了产品制造成本。
The electrical properties of TFT-LCD are so significant especially for the leakage current at photo state (Photo I
off
).In this paper we investigated the factors which could affect the Photo I
off
in order to improve the TFT-LCD performance.A measurement method has been proposed based on experiment results.The black matrix (BM) photo resist (PR) has been used to shield different parts of TFT channel
then the difference of electrical properties could be confirmed through TFT
I-V
curve.According to the experiment results
it is quite easy and effective to decrease the photo I
off
value by optimizing the gate line width.Finally we used this method on 54.6 cm(21.5 in)TFT LCD samples.Optimized results showed that the gate line should be widened 1.5 m based on the original design.The actual result was proved though TFT characteristic measurement results
the photo I
off
decreased to 9.50 pA from 14.08 pA.It turns out that the proposed method is quite effective in the practical production process.
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