溶胶-凝胶法制备的用于模式控制型液晶透镜的AZO高电阻薄膜

王伟郅; 于涛; 巩伟兴; 肖奇; 温志玉; 张嘉伦; 黄志宇

doi:10.37188/YJYXS20203510.1006

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溶胶-凝胶法制备的用于模式控制型液晶透镜的AZO高电阻薄膜

材料物理 | 更新时间：2020-09-28

- 溶胶-凝胶法制备的用于模式控制型液晶透镜的AZO高电阻薄膜
- Properties of AZO film prepared by Sol-Gel in liquid crystal lens with modal control
- 液晶与显示 2020年35卷第10期页码：1006-1011
- 作者机构：
  
  大连海事大学理学院, 辽宁大连 116026
- 作者简介：
  
  [ "王伟郅(1995-), 男, 辽宁鞍山人, 硕士, 2020年于大连海事大学获得硕士学位, 主要从事光学与显示技术方面的研究。E-mail:1114720516@qq.com" ]
  [ "于涛(1971-), 男, 黑龙江七台河人, 博士, 教授, 2004年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事光学与显示技术方面的研究。E-mail:yutao@dlmu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金(11404048);Research Program of Fundamental Research Funds for the Central Universities(3132016349)
- DOI：10.37188/YJYXS20203510.1006
  中图分类号： O43;O753.2
- 收稿日期：2020-01-17，
  
  修回日期：2020-03-16，
  
  录用日期：2020-3-16，
  
  纸质出版日期：2020-10-05
- 稿件说明：
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王伟郅, 于涛, 巩伟兴, 等. 溶胶-凝胶法制备的用于模式控制型液晶透镜的AZO高电阻薄膜[J]. 液晶与显示, 2020,35(10):1006-1011.

Wei-zhi WANG, Tao YU, Wei-xing GONG, et al. Properties of AZO film prepared by Sol-Gel in liquid crystal lens with modal control[J]. Chinese journal of liquid crystals and displays, 2020, 35(10): 1006-1011.
王伟郅, 于涛, 巩伟兴, 等. 溶胶-凝胶法制备的用于模式控制型液晶透镜的AZO高电阻薄膜[J]. 液晶与显示, 2020,35(10):1006-1011. DOI： 10.37188/YJYXS20203510.1006.

Wei-zhi WANG, Tao YU, Wei-xing GONG, et al. Properties of AZO film prepared by Sol-Gel in liquid crystal lens with modal control[J]. Chinese journal of liquid crystals and displays, 2020, 35(10): 1006-1011. DOI： 10.37188/YJYXS20203510.1006.

摘要

采用溶胶-凝胶法制备了掺杂摩尔分数为5%~20%的Al掺杂ZnO(AZO)高电阻薄膜，采用正方形电阻法表征了薄膜的方块电阻，采用扫描电子显微镜(SEM)对薄膜形貌进行了表征，采用Nano Measurer 1.2软件测量了薄膜晶粒的平均粒径，采用分光光度计表征了薄膜的光谱透过率。当Al掺杂摩尔分数为5%~20%时，方块电阻在2~405 MΩ/□之间逐渐增大，晶粒尺寸在24.35~17.53 nm之间逐渐减小，可见光透过率可达80%左右。制备了不同Al掺杂摩尔分数的AZO高电阻层的模式控制型液晶透镜并研究了其光学干涉特性，掺杂摩尔分数在10%~15%之间，AZO薄膜可满足液晶透镜对薄膜透明度和方块电阻的要求。

Abstract

Al-doped ZnO (AZO) high-resistance films with the doping mole fraction between 5%~20% are prepared by Sol-Gel method. The sheet resistance of the films are characterized by the square resistance method. The morphology of the films are characterized by scanning electron microscopy (SEM). Nano Measurer 1.2 software is used to measure the mean particle radius of the film grains

and the spectral transmittance of the film was characterized by a spectrophotometer. When the doping mole fraction of Al is between 5%~20%

the sheet resistance gradually increases between 2~405 MΩ/□

the grain size gradually decreases between 24.35~17.53 nm

and the visible light transmittance can reach about 80%. The liquid crystal lenses with modal control of AZO high-resistance layers with different Al doping mole fraction are prepared and their optical interference characteristics are studied. AZO films with the doping mole fraction between 10% and 15% can meet the requirements of liquid crystal lenses for film transparency and square resistance.

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references

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