基于杂质离子含量评价的LTPS-LCD面板测量体系

邓文广; 许叶潞; 温建辉; 黄碧钦; 金昌连

doi:10.37188/CJLCD.2021-0119

您当前的位置：

首页 >

文章列表页 >

基于杂质离子含量评价的LTPS-LCD面板测量体系

显示技术与应用 | 更新时间：2021-09-30

- 基于杂质离子含量评价的LTPS-LCD面板测量体系
- Masurement system of LTPS-LCD panel based on evaluation of impurity ion content
- 液晶与显示 2021年36卷第10期页码：1388-1394
- 作者机构：
  
  厦门天马微电子有限公司, 福建厦门 361220
- 作者简介：
  
  [ "邓文广(1975-), 男, 江苏昆山人, 1999年于抚顺石油学院获得学士学位, 主要负责TFT-LCD技术整合统筹工作。E-mail: wenguang_deng@tianma.cn" ]
  [ "许叶潞(1990-), 男, 江西南昌人, 硕士研究生, 2015年于厦门大学获得硕士学位, 主要从事TFTGLCD技术整合工作. E-mail:yelu_xu@tianma.cn" ]
- 基金信息：
  
  国家自然科学基金(61401425);国家自然科学基金青年科学基金项目(61602432)
- DOI：10.37188/CJLCD.2021-0119
  中图分类号： TN873.93;TB497
- 收稿日期：2021-04-09，
  
  修回日期：2021-05-27，
  
  纸质出版日期：2021-10
- 稿件说明：
移动端阅览
邓文广, 许叶潞, 温建辉, 等. 基于杂质离子含量评价的LTPS-LCD面板测量体系[J]. 液晶与显示, 2021,36(10):1388-1394.

Wen-guang DENG, Ye-lu XU, Jian-hui WEN, et al. Masurement system of LTPS-LCD panel based on evaluation of impurity ion content[J]. Chinese journal of liquid crystals and displays, 2021, 36(10): 1388-1394.
邓文广, 许叶潞, 温建辉, 等. 基于杂质离子含量评价的LTPS-LCD面板测量体系[J]. 液晶与显示, 2021,36(10):1388-1394. DOI： 10.37188/CJLCD.2021-0119.

Wen-guang DENG, Ye-lu XU, Jian-hui WEN, et al. Masurement system of LTPS-LCD panel based on evaluation of impurity ion content[J]. Chinese journal of liquid crystals and displays, 2021, 36(10): 1388-1394. DOI： 10.37188/CJLCD.2021-0119.

摘要

残像是影响液晶显示器（LCD）面板品质的重要因素，残像的不良改善已成为面板工厂持续性研究课题。残像程度与杂质离子的含量正相关，为了实现对低温多晶硅（LTPS）LCD盒内杂质离子含量的监控，本文系统地对LTPS-LCD面板测试盒测量体系进行了研究，并对该测量体系的稳定性、分辨能力进行了探讨。首先针对LTPS技术的面板设计了一种新的测试盒，然后采用液晶电压保持率（Voltage Holding Residual，VHR）评价盒内杂质离子含量，运用测量系统分析方法对其可靠性进行评估，最后通过对比不同紫外线（UV）照射时间与光配向烘烤时间下VHR的变化分析其分辨力。实验结果表明：该测量体系的量具重复性、再现性（Gage R & R%）为10.77%，变异与流程公差（P/T）为26.93%＜30%，可区分数为13＞5，不同批次VHR均值维持在93%~95%，测量结果可靠、稳定，并能有效识别出VHR差异。本文设计的测试盒符合LTPS-LCD面板产业对杂质离子含量监测需求，可为工厂实际生产中杂质离子的监控提供参考。

Abstract

Image sticking is an important factor affecting the quality of liquid crystal display (LCD) panel. The improvement of poor image sticking has been a continuous research topic in LCD panel factory. The degree of image sticking is positively correlated with the content of impurity ions. In order to monitor the content of impurity ions in the LTPS(Low Temperature Poly-Silicon)-LCD cell

the measurement system of the LTPS-LCD panel test cell is systematically studied

and the stability and resolution of the measurement system are discussed. Firstly

the measurement system designes a new test cell for the LTPS technology panel

and then uses voltage holding residual (VHR) to evaluate the impurity ion content in the cell

and the measurement systems analysis (MSA) is used to evaluate the reliability. Finally

the resolution of the measurement system is tested by comparing the changes of VHR under different ultraviolet (UV) irradiation time and photo-alignment baking time. The experimental results show that the measurement system gage repeatability

reproducibility(Gage R & R%) is 10.77%

P/T is 26.93% < 30%

distinguishable score is 13> 5

the measurement results are reliable and stable

and can effectively identify VHR differences. The test cell designed in this paper meets the requirements of the LTPS-LCD panel industry for impurity ion content monitoring

and provides important guidance for monitoring factory impurity ions in actual production.

关键词

Keywords

references

许卓 , 金熙哲 , 吴海龙 , 等 . LCD面板TFT特性相关残像研究 . 液晶与显示 , 2018 . 33 ( 3 ): 195 - 201 . DOI: 10.3788/YJYXS20183303.0195 http://doi.org/10.3788/YJYXS20183303.0195 .

Z XU , X Z JIN , H L WU , 等 . Influence of TFT character on LCD image sticking . Chinese Journal of Liquid Crystals and Displays , 2018 . 33 ( 3 ): 195 - 201 . DOI: 10.3788/YJYXS20183303.0195 http://doi.org/10.3788/YJYXS20183303.0195 .

AHN H J, HWANG H S, KIM D G, et al . Improvement of the long-term image sticking in an IPS-LCD by development of LCD cell materials[C]// Proceedings of the 15 th International Display Workshops . Niigata. Japan: IDW, 2008: 1571-1572.

张少楠 , 郭小军 , 崔宏青 . 正负液晶在FFS中的比较和研究 . 液晶与显示 , 2014 . 29 ( 3 ): 322 - 327 . DOI: 10.3788/YJYXS20142903.0322 http://doi.org/10.3788/YJYXS20142903.0322 .

S N ZHANG , X J GUO , H Q CUI . Study and comparison of positive and negative LC in FFS applications . Chinese Journal of Liquid Crystals and Displays , 2014 . 29 ( 3 ): 322 - 327 . DOI: 10.3788/YJYXS20142903.0322 http://doi.org/10.3788/YJYXS20142903.0322 .

范恒亮 , 汤展峰 , 刘利萍 , 等 . TFT-LCD残影不良的研究与改善 . 液晶与显示 , 2016 . 31 ( 3 ): 270 - 275 . DOI: 10.3788/YJYXS20163103.0270 http://doi.org/10.3788/YJYXS20163103.0270 .

H L FAN , Z F TANG , L P LIU , 等 . Research and improvement of TFT-LCD image-retention . Chinese Journal of Liquid Crystals and Displays , 2016 . 31 ( 3 ): 270 - 275 . DOI: 10.3788/YJYXS20163103.0270 http://doi.org/10.3788/YJYXS20163103.0270 .

Karube M. Low power consumption for circuit integration of low temperature poly-Si TFT-LCDs[C]// Proceedings IDW/AD '05. 2005: 1229-1230.

王猛 , 王岩 , 韦德泉 , 等 . 松果状纳米氧化铁对液晶电光性能的影响 . 应用化学 , 2019 . 36 ( 5 ): 578 - 584 . https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201905012.htm https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201905012.htm .

M WANG , Y WANG , D Q WEI , 等 . Influence of pinecone-like ferric oxide on the electro-optical properties of nematic liquid crystals . Chinese Journal of Applied Chemistry , 2019 . 36 ( 5 ): 578 - 584 . https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201905012.htm https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201905012.htm .

胡郁蓬 , 鲁广昊 . 有机半导体薄膜空间电荷分布对晶体管性能影响的研究进展 . 应用化学 , 2019 . 36 ( 8 ): 855 - 881 . https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201908002.htm https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201908002.htm .

Y P HU , G H LU . Research progress on the effect of space charge distribution of organic semiconductor thin films on transistor performance . Chinese Journal of Applied Chemistry , 2019 . 36 ( 8 ): 855 - 881 . https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201908002.htm https://www.cnki.com.cn/Article/CJFDTOTAL-YYHX201908002.htm .

刘莎 , 王丹 , 杨照坤 , 等 . TFT-LCD技术发展趋势浅析 . 液晶与显示 , 2018 . 33 ( 6 ): 457 - 463 . DOI: 10.3788/YJYXS20183306.0457 http://doi.org/10.3788/YJYXS20183306.0457 .

S LIU , D WANG , Z K YANG , 等 . Key technology trends analysis of TFT-LCD . Chinese Journal of Liquid Crystals and Displays , 2018 . 33 ( 6 ): 457 - 463 . DOI: 10.3788/YJYXS20183306.0457 http://doi.org/10.3788/YJYXS20183306.0457 .

刘阳 , 张彬祥 , 黄楚佳 . 柔性OLED薄膜封装技术分析 . 光电子技术 , 2017 . 37 ( 2 ): 139 - 145 . https://www.cnki.com.cn/Article/CJFDTOTAL-GDJS201702013.htm https://www.cnki.com.cn/Article/CJFDTOTAL-GDJS201702013.htm .

Y LIU , B X ZHANG , C J HUANG . Analysis of thin film encapsulation technology of flexible OLED . Optoelectronic Technology , 2017 . 37 ( 2 ): 139 - 145 . https://www.cnki.com.cn/Article/CJFDTOTAL-GDJS201702013.htm https://www.cnki.com.cn/Article/CJFDTOTAL-GDJS201702013.htm .

J R MANDERS , L QIAN , A TITOV , 等 . High efficiency and ultra-wide color gamut quantum dot LEDs for next generation displays . Journal of the Society for Information Display , 2015 . 23 ( 11 ): 523 - 528 . DOI: 10.1002/jsid.393 http://doi.org/10.1002/jsid.393 .

S J PHENIX . Display technology trends in digital signage display . SID Symposium Digest of Technical Papers , 2017 . 48 ( 1 ): 608 - 611 . DOI: 10.1002/sdtp.11712 http://doi.org/10.1002/sdtp.11712 .

童芬 , 郭小军 . 负性液晶在FFS模式下的残像研究 . 液晶与显示 , 2015 . 30 ( 3 ): 393 - 398 . DOI: 10.3788/YJYXS20153003.0393 http://doi.org/10.3788/YJYXS20153003.0393 .

F TONG , X J GUO . Image sticking study of negative LC for FFS mode . Chinese Journal of Liquid Crystals and Displays , 2015 . 30 ( 3 ): 393 - 398 . DOI: 10.3788/YJYXS20153003.0393 http://doi.org/10.3788/YJYXS20153003.0393 .

林鸿涛 , 郤玉生 , 胡海琛 , 等 . TFT-LCD中驱动信号对线残像的改善研究 . 液晶与显示 , 2012 . 27 ( 3 ): 359 - 363 . DOI: 10.3788/YJYXS20122703.0359 http://doi.org/10.3788/YJYXS20122703.0359 .

H T LIN , Y S XI , H C HU , 等 . Improvement research of line image sticking by drive signal in TFT-LCD . Chinese Journal of Liquid Crystals and Displays , 2012 . 27 ( 3 ): 359 - 363 . DOI: 10.3788/YJYXS20122703.0359 http://doi.org/10.3788/YJYXS20122703.0359 .

焦峰 , 王海宏 . TFT-LCD残像原理与分析(基础篇) . 现代显示 , 2012 . ( 4 ): 54 - 59 . DOI: 10.3969/j.issn.1006-6268.2012.04.019 http://doi.org/10.3969/j.issn.1006-6268.2012.04.019 .

F JIAO , H H WANG . The theory and analysis of TFT-LCD image sticking (Basis) . Advanced Display , 2012 . ( 4 ): 54 - 59 . DOI: 10.3969/j.issn.1006-6268.2012.04.019 http://doi.org/10.3969/j.issn.1006-6268.2012.04.019 .

梁珂. TFT LCD影像残留的研究[D]. 天津: 天津大学, 2006.

LIANG K. Study of TFT LCD image sticking[D]. Tianjin: Tianjin University, 2006. (in Chinese)

刘晓那 , 宋勇志 , 徐长健 , 等 . 配向膜材料与面残影的关联性研究 . 液晶与显示 , 2014 . 29 ( 3 ): 317 - 321 . DOI: 10.3788/YJYXS20142903.0317 http://doi.org/10.3788/YJYXS20142903.0317 .

X N LIU , Y Z SONG , C J XU , 等 . Relationship between alignment film and image sticking . Chinese Journal of Liquid Crystals and Displays , 2014 . 29 ( 3 ): 317 - 321 . DOI: 10.3788/YJYXS20142903.0317 http://doi.org/10.3788/YJYXS20142903.0317 .

JACOB T, FINKENZELLERU. Physical properties of Liquid crystals: VIII Voltage holding ratio[R] Merck, 1992.

浏览量

358

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

TFT-LCD高温残像的改善

莨菪烷基添加剂对FFS模式中残像的影响

一种针对AMOLED器件劣化的电学补偿技术

一种新型TFT-LCD用配向膜材料研究