飞秒脉冲激光空间光场调控的微透镜阵列制备技术进展

樊华; 曹小文; 李臻赜; 王熠; 王磊; 徐颖

doi:10.37188/CJLCD.2020-0334

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飞秒脉冲激光空间光场调控的微透镜阵列制备技术进展

液晶空间光调制器及其应用 | 更新时间：2021-05-28

- 飞秒脉冲激光空间光场调控的微透镜阵列制备技术进展
- Progress in femtosecond laser fabrication of microlens array with spatial light modulators
- 液晶与显示 2021年36卷第6期页码：827-840
- 作者机构：
  
  1.清华大学精密仪器系, 北京 100083
  2.中国科学院宁波材料技术与工程研究所, 浙江宁波 315201
  3.吉林大学电子科学与工程学院, 吉林长春 130012
- 作者简介：
  
  [ "樊华(1991-), 男, 河南南阳人, 博士, 助理研究员, 2020年于吉林大学获得博士学位, 主要从事飞秒激光微纳加工领域的研究。E-mail: fanhua2020@tsinghua.edu.cn" ]
  [ "王磊(1987-), 男, 吉林长春人, 博士, 教授, 2015年于吉林大学获得博士学位, 主要从事飞秒激光与物质相互作用和多维光学信息存储与读出的研究。E-mail: leiwang1987@jlu.edu.cn" ]
  [ "徐颖(1969-), 女, 吉林长春人, 博士, 教授, 2002年于日本德岛大学获得博士学位, 主要从事超快激光微纳加工及其在微流控、微传感、超疏水等方面的研究。E-mail: xuying1969@hotmail.com" ]
- 基金信息：
  
  国家自然科学基金(61590930);国家自然科学基金(61805100);国家自然科学基金(61827826)
- DOI：10.37188/CJLCD.2020-0334
  中图分类号： TN249
- 收稿日期：2020-12-09，
  
  修回日期：2021-01-14，
  
  纸质出版日期：2021-06
- 稿件说明：
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樊华, 曹小文, 李臻赜, 等. 飞秒脉冲激光空间光场调控的微透镜阵列制备技术进展[J]. 液晶与显示, 2021,36(6):827-840.

Hua FAN, Xiao-wen CAO, Zhen-ze LI, et al. Progress in femtosecond laser fabrication of microlens array with spatial light modulators[J]. Chinese journal of liquid crystals and displays, 2021, 36(6): 827-840.
樊华, 曹小文, 李臻赜, 等. 飞秒脉冲激光空间光场调控的微透镜阵列制备技术进展[J]. 液晶与显示, 2021,36(6):827-840. DOI： 10.37188/CJLCD.2020-0334.

Hua FAN, Xiao-wen CAO, Zhen-ze LI, et al. Progress in femtosecond laser fabrication of microlens array with spatial light modulators[J]. Chinese journal of liquid crystals and displays, 2021, 36(6): 827-840. DOI： 10.37188/CJLCD.2020-0334.

摘要

作为最基本的微光学元件，微透镜在多个领域都有非常广泛的潜在应用，然而常见的面向透明硬脆材料微透镜的制备方法效率低下，且对作业环境的要求较高，极大地限制了透明硬脆材料微透镜阵列的大面积制备。空间光调制器作为一种对光场进行调制的设备，可以方便地实现多焦点或者结构化的光场，在光通讯、激光加工等领域具有重要的应用潜力。本文介绍了利用飞秒激光烧蚀结合湿法刻蚀制备硬脆材料微透镜阵列的基本方法，并系统地分析了影响所制备微透镜形貌的关键因素。通过在加工过程中对聚焦光斑的数量和位置进行精细调控，极大地提高了透明硬脆材料微透镜阵列的加工效率，且可以在加工过程中动态地调整飞秒激光烧蚀改性的形貌，从而实现不同尺寸微透镜阵列的高速制备，展现了空间光场调制技术在微光子集成芯片加工领域的应用前景。

Abstract

As a basic micro-optics element

microlens has widespread applications in many fields

whereas the common fabrication methods for microlens compounded from transparent and brittle materials always have a low efficiency and high requirement for environment. Liquid crystal spatial light modulation (SLM) as a light modulation instrument

can realize multi-focus or structured light fields easily

and has important potential application values in optical communication or microfabrication based on ultrafast laser. Herein

a fabrication method is introduced for microlens

which combines the advantages of femtosecond (Fs) laser microfabrication and wetting etch. The key factors influencing the morphology of microlens are analyzed systematically. By introduction of the spatial light field modulation in the femtosecond laser micro/nano fabrication

the number as well as the position of focused spots can be finely controlled

which not only greatly enhances the fabrication efficiency of microlens arrays out of transparent and brittle materials

but also makes it possible to adjust the morphology of femtosecond laser ablation modification dynamically during processing. The application of spatial light field modulation in micro-photonic integrated chip fabrication is well demonstrated.

关键词

Keywords

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