WO<sub>3</sub>薄膜电致变色器件的响应时间测试及其改善方案

孙天皓; 刘红均; 伏桂月; 娄飞; 李涵; 刘召军; 邱成峰

doi:10.37188/CJLCD.2020-0293

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WO₃薄膜电致变色器件的响应时间测试及其改善方案

器件物理及器件制备 | 更新时间：2021-04-28

- WO₃薄膜电致变色器件的响应时间测试及其改善方案
- Measuring and improving response time of WO₃ thin film electrochromic devices
- 液晶与显示 2021年36卷第5期页码：641-648
- 作者机构：
  
  南方科技大学电子与电气工程系, 广东深圳 518055
- 作者简介：
  
  [ "孙天皓(1996-), 男, 黑龙江哈尔滨人, 硕士, 2020年于哈尔滨工业大学-南方科技大学联培获得硕士学位, 主要从事电致变色器件的研究。E-mail: 981954007@qq.com" ]
  [ "刘召军(1979-), 男, 中国香港人, 博士, 研究员, 2010年于香港科技大学获得博士学位, 主要从事先进显示与AR/VR技术与第三代半导体电子器件与发光器件领域研究。E-mail:liuzj@sustech.edu.cn" ]
  [ "邱成峰(1961-), 男, 广东深圳人, 博士, 教授, 1993年于西安交通大学获得博士学位, 主要从事发光显示技术领域研究。E-mail: qiucf@sustech.edu.cn" ]
- 基金信息：
  
  广东省省级科技计划项目(2018A050506002);深圳市科技计划项目(KQTD20170810110313773);深圳市科技计划项目(JCYJ20190812141803608);深圳市协同创新科技计划(20190520170400210)
- DOI：10.37188/CJLCD.2020-0293
  中图分类号： TN27;TN383.1
- 收稿日期：2020-11-03，
  
  修回日期：2021-01-15，
  
  纸质出版日期：2021-05
- 稿件说明：
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孙天皓, 刘红均, 伏桂月, 等. WO₃薄膜电致变色器件的响应时间测试及其改善方案[J]. 液晶与显示, 2021,36(5):641-648.

Tian-hao SUN, Hong-jun LIU, Gui-yue FU, et al. Measuring and improving response time of WO₃ thin film electrochromic devices[J]. Chinese journal of liquid crystals and displays, 2021, 36(5): 641-648.
孙天皓, 刘红均, 伏桂月, 等. WO₃薄膜电致变色器件的响应时间测试及其改善方案[J]. 液晶与显示, 2021,36(5):641-648. DOI： 10.37188/CJLCD.2020-0293.

Tian-hao SUN, Hong-jun LIU, Gui-yue FU, et al. Measuring and improving response time of WO₃ thin film electrochromic devices[J]. Chinese journal of liquid crystals and displays, 2021, 36(5): 641-648. DOI： 10.37188/CJLCD.2020-0293.

摘要

电致变色（Electrochromism，EC）器件，具有工作电压低、多稳态、静态无功耗、变色功耗低、透光度/反射度连续可调等特点。WO

制作的电致变色器件存在响应时间过长、光学调制幅度较低等问题。为了能够进一步缩短响应时间，本文使用WO

作为变色层的材料并制备电致变色器件，研究了不同氩氧流量比下对WO

薄膜的影响以及对响应时间的影响，且以Ag-WO

复合层作为变色层的改进方案来制备电致变色器件，研究其对响应时间的影响。研究表明：当氩氧流量比为50∶50时，WO

薄膜制备的电致变色器件的响应时间最短，着色响应时间与褪色响应时间分别为21.27 s与11.68 s；Ag-WO

复合薄膜制作的电致变色器件，当Ag层厚度为6 nm时，两种响应时间最小，着色响应时间与褪色响应时间分别为12.71 s和7.89 s。WO

薄膜制作的电致变色器件，在不同氩氧流量比下器件的响应时间受到影响；Ag-WO

复合薄膜制作的电致变色器件响应时间与用WO

制作的器件相比明显缩短，但是当Ag层厚度增加时，器件的响应时间随之增加。

Abstract

Electrochromic (EC) devices possess the advantages of low operating voltage

many stable states

non power consumption under static state

low power consumption for color change and continuously adjustable transmittance/reflectance and so on. WO

electrochromic devices have problems such as long response time and low optical modulation amplitude. In order to further shorten the response time

this article uses WO

film as the color changing layer to prepare electrochromic devices. The effect of different argon-oxygen flow ratios on the WO

film deposition and the response time of EC devices are studied. In order to further shorten response time

we used the Ag-WO

composite layer as the color-changing layer for the EC devices. The results show

when the argon-oxygen flow ratio is at 50:50

the response time of the EC devices prepared only by the WO

film is the shortest. The coloring time and the fading response time are 21.27 s and 11.68 s respectively. When the EC devices were using the Ag-WO

composite film as the color-changing layer and the Ag layer thickness is 6 nm

the two response times are the shortest. The coloring time and the fading response time are 12.71 s and 7.89 s respectively. The response time of the EC devices prepared by WO

film is influenced on different argon-oxygen flow ratios. Moreover

the response time of the EC devices prepared by Ag-WO

composite film is significantly shorter than that of the devices made by WO

film. However

when the Ag layer thickness increases

the response time of the devices also increases.

关键词

Keywords

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WO3薄膜电致变色器件的响应时间测试及其改善方案

Measuring and improving response time of WO3 thin film electrochromic devices

DOI：10.37188/CJLCD.2020-0293

摘要

Abstract

关键词

Keywords

references

WO₃薄膜电致变色器件的响应时间测试及其改善方案

Measuring and improving response time of WO₃ thin film electrochromic devices