不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长

王超; 杨小天; 唐魏; 赵春雷; 杨佳; 高晓红; 李香萍; 高忠民; 杜国同

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不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长

器件制备技术及器件物理 | 更新时间：2020-08-12

- 不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长
- Growth of ZnO Films on Different Substrates by Metal Organic Chemical Vapor Deposition
- 液晶与显示 2009年24卷第5期页码：666-669
- 作者机构：
  
  1. 2. 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 3. 吉林大学电子科学与工程学院,吉林长春,130012
  3. 吉林大学化学学院,吉林长春,130012
  4. 吉林建筑工程学院电气与电子信息学院,吉林长春,130021
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2009-02-27，
  
  修回日期：1900-01-02，
  
  网络出版日期：2009-10-30，
  
  纸质出版日期：2009-10-30
- 稿件说明：
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王超;杨小天;唐魏;赵春雷;杨佳;高晓红;李香萍;高忠民;杜国同. 不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长[J]. 液晶与显示, 2009,24(5): 666-669

WANG Chao;YANG Xiao-tian;TANG Wei;ZHAO Chun-lei;YANG Jia;GAO Xiao-hong;LI Xiang-ping;GAO Zhong-min;DU Guo-tong. Growth of ZnO Films on Different Substrates by Metal Organic Chemical Vapor Deposition[J]. 液晶与显示, 2009,24(5): 666-669
王超;杨小天;唐魏;赵春雷;杨佳;高晓红;李香萍;高忠民;杜国同. 不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长[J]. 液晶与显示, 2009,24(5): 666-669 DOI：

WANG Chao;YANG Xiao-tian;TANG Wei;ZHAO Chun-lei;YANG Jia;GAO Xiao-hong;LI Xiang-ping;GAO Zhong-min;DU Guo-tong. Growth of ZnO Films on Different Substrates by Metal Organic Chemical Vapor Deposition[J]. 液晶与显示, 2009,24(5): 666-669 DOI：

摘要

氧化锌薄膜通过金属有机化学气相沉积方法生长在康宁玻璃与α蓝宝石衬底上，研究了有关薄膜的生长质量与发光特性。通过Ｘ光衍射方法测试研究发现，不仅在以α蓝宝石为衬底的样品中，同时，在以玻璃为衬底的样品中都发现了氧化锌（００２）方向生长的尖峰，表明生长在两种衬底上的样品都是高度的犆向生长。对两种样品的荧光谱研究发现，两者的紫外峰位于３７４ｎｍ附近，在以α蓝宝石为衬底的样品中，有深能级发射，但在以玻璃为衬底的样品中没有发现，表明在玻璃衬底上我们生长出了高质量的氧化锌薄膜。通过原子力显微镜，对生长在两种衬底上薄膜的表面形貌做了观察，其晶粒的大小与表面粗糙度有一定的差别，表明二者都是以柱状形式生长的。

Abstract

ZnO thin films were grown on two kinds of substrates of Corning glass and -Al

by metal organic chemical vapor deposition. The properties of the films were studied. It was found the sharp diffraction peak for ZnO (002) by X-ray diffraction method

not only in the sample of the substrate of -Al

(A)

but also in the sample of the substrate of Corning glass(B)

showing the two samples were highly

-axis oriented. The photoluminescence (PL) spectra of the ZnO films were studied. The UV emission at ~374 nm was found in sample A and B. The deep level emissions was found in the sample A

but not in the sample B

showing that the high quality ZnO films was grown on the substrate of glass. The surface morphology was studied by the AFM also. Though the average size of grain and the RMS(root-mean-square) value of the two samples is diffe-rent

comparing sample A with B

the result shows that sample A is more smooth. It can be found that the samples A and B were all grown in a column-by-column growth process.

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references

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