Research and improvement of dark corner Mura in TFT-LCD

Bin-bin CAO; Xing-yi LIU; Peng CHEN; Jun-lin PENG; Zeng-qian YANG; Hui AN; Yi WANG; Fang-fa

doi:10.3788/YJYXS20203502.0122

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Research and improvement of dark corner Mura in TFT-LCD

Materials and Devices | 更新时间：2020-07-16

- Research and improvement of dark corner Mura in TFT-LCD
- Chinese Journal of Liquid Crystals and Displays Vol. 35, Issue 2, Pages: 122-127(2020)
- 作者机构：
  
  合肥鑫晟光电科技有限公司, 安徽合肥 230001
- 作者简介：
- 基金信息：
- DOI：10.3788/YJYXS20203502.0122
  CLC： TN321.5
- Received：13 June 2019，
  
  Revised：23 October 2019，
  
  Accepted：23 October 2019，
  
  Published：05 February 2020
- 稿件说明：
移动端阅览
Bin-bin CAO, Xing-yi LIU, Peng CHEN, et al. Research and improvement of dark corner Mura in TFT-LCD[J]. Chinese journal of liquid crystals and displays, 2020, 35(2): 122-127.
DOI：

Bin-bin CAO, Xing-yi LIU, Peng CHEN, et al. Research and improvement of dark corner Mura in TFT-LCD[J]. Chinese journal of liquid crystals and displays, 2020, 35(2): 122-127. DOI： 10.3788/YJYXS20203502.0122.

摘要

研究了一种长期THO信赖性过程中产生的四角发黑Mura。由于该Mura在TFT膜面可见，本文重点模拟分析了TFT侧在信赖性过程中电容的变化，确定了不良是存储电容（

）变化引发的电学不良，其机理为水汽不断进入第二绝缘层（PVX2），

持续增大，进而造成了TFT-LCD像素充电电压和灰阶的降低。通过降低沉积压强和提高Si/N比，PVX2膜层致密性和阻水性加强，模拟信赖性测试中电容的变化由19.6%降至0.5%，成功解决了该不良，避免了信赖性风险，提升了产品品质。

Abstract

The dark corner Mura produced in the long-term process of THO reliability is studied. Because the Mura is visible on the TFT film surface

the capacitance change in TFT side during the process of reliability is mainly simulated and analyzed

and it is determined that it is a kind of electrical defect caused by the change of

. The mechanism is that water continuously enters into the PVX2 film and

increases at the same times

resulting in the reduction of the charging voltage and gray scale of TFT-LCD pixels. After improving the compactness of PVX2 film by decreasing pressure and increasing Si/N ratio in the deposition process

the change of capacitance decreases from 19.6% to 0.5% in the simulation reliability test because of the better capability of water resistance

which successfully solves the problem

avoids the risk in the reliability test and improves the product quality.

关键词

Keywords

references

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