Forming photo spacer by layer stacking on TFT-LCD CF substrate

Shi SHU; Yong-lian QI; Chuan-xiang XU; Feng ZHANG; Cheng-zhen CUI

doi:10.3788/YJYXS20173212.0956

您当前的位置：

首页 >

文章列表页 >

Forming photo spacer by layer stacking on TFT-LCD CF substrate

Material Science | 更新时间：2020-07-07

- Forming photo spacer by layer stacking on TFT-LCD CF substrate
- Chinese Journal of Liquid Crystals and Displays Vol. 32, Issue 12, Pages: 956-960(2017)
- 作者机构：
  
  京东方科技集团股份有限公司技术研发中心, 北京 100176
- 作者简介：
- 基金信息：
- DOI：10.3788/YJYXS20173212.0956
  CLC： O472+.1
- Received：01 June 2017，
  
  Accepted：08 July 2017，
  
  Published：05 December 2017
- 稿件说明：
移动端阅览
Shi SHU, Yong-lian QI, Chuan-xiang XU, et al. Forming photo spacer by layer stacking on TFT-LCD CF substrate[J]. Chinese journal of liquid crystals and displays, 2017, 32(12): 956-960.
DOI：

Shi SHU, Yong-lian QI, Chuan-xiang XU, et al. Forming photo spacer by layer stacking on TFT-LCD CF substrate[J]. Chinese journal of liquid crystals and displays, 2017, 32(12): 956-960. DOI： 10.3788/YJYXS20173212.0956.

摘要

本文研究了液晶显示面板彩色滤光片工艺中以叠层方式形成隔垫物的关键技术问题，即叠层隔垫物高度控制、主-附隔垫物段差的形成和主-附隔垫物段差受后续平坦层工艺的影响变化等，并提出了解决方案。在黑矩阵、红色、绿色、蓝色滤光层形成一定的叠层高度后，采用形貌追随型平坦化材料对像素区平坦，通过控制像素开口部分OC的厚度，可以实现叠层隔垫物高度的控制。采用改变叠层图案设计的方法形成主-副隔垫物高度差（Main-sub段差），段差达成范围是0.4~1.2

m，达到了灰阶曝光方式可以达到段差的水平，但成本却大幅降低。并且验证了采用形貌追随型OC材料覆盖可以较好的保持OC工艺前形成的Main-sub段差。基于以上技术制备了4 Mask彩色滤光片原型机。

Abstract

The key issue of forming photo spacer by layer stacking on TFT-LCD CF substrate

such as height control

main-sub difference tuning and the variation of main-sub different after OC process is investigated. Corresponding solution has been proposed. A shape-following OC material is used to control PS height by tuning OC thickness

which indicates that the thickness of BM

Red

Green

Blue layer won't has to be changed to achieve certain stacking height. The main-sub difference can be acquired by changing pattern size of each Stacking layers. The tuning range of main-sub difference is 0.4~1.2

which already reaches the level of half tone mask technology

but at much lower cost. It is confirmed that the main-sub difference formed by BM/R/G/B layer stacking can be maintained after OC process. A prototype of 4 mask Color filter is fabricated

based on stacking photo spacer technology.

关键词

Keywords

references

王玉如.液晶显示技术的最新进展[J].现代电子技术, 2004, 27(22):85-87.

WANG Y R. The new development of TFTLCD[J]. Modern Electronics Technique, 2004, 27(22):85-87. (in Chinese)

张家祥, 卢凯, 郭建, 等.TFT-LCD器件氧化铟锡层无退火工艺研究[J].液晶与显示, 2014, 29(1):55-59.

ZHANG J X, LU K, GUO J, et al. Anneal skip of ITO layer in TFT-LCD[J]. Chinese Journal of Liquid Crystals and Displays, 2014, 29(1):55-59. (in Chinese)

李宏彦, 杨久霞, 吕艳英, 等.TFT-LCD用彩色滤光片[J].现代显示, 2005(6):41-44.

LI H Y, YANG J X, LV Y Y, et al. Color filter for TFT-LCD[J]. Advanced Display, 2005(6):41-44. (in Chinese)

YAMADA S, KIMURA S, SAKAI N, et al. A new production of the large size TFT-panel by "LC-Dropping Method"[J]. SID Symposium Digest of Technical Papers, 2001, 32(1):1350-1353.

杨国波, 王永茂, 赵军, 等.ODF工艺的进展[J].光机电信息, 2011, 28(1):23-27.

YANG G B, WANG Y M, ZHAO J, et al. Development of ODF process[J]. OME Information, 2011, 28(1):23-27. (in Chinese)

ODAHARA S, YAMASHITA H, MOMOI Y, et al. Post spacer technology for TFT/LCD[J]. SID Symposium Digest of Technical Papers, 2001, 32(1):1358-1361.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Analysis and improvement of bubble defect in TN mode liquid crystal panel

Research and development of high transmittance transparent liquid crystal display

Synthesis and Performance of Polyacrylate Resin Used on Pigment-Dispersion

Related Author

Chao WANG

Xi-liang XU

Zhi-xiao YAO

Dong-yan ZHU

Jian WANG

WANG Hai-hong

JIAO Feng

MA Qun-gang

Related Institution

Beijing BOE Display Technology Co., Ltd.

南京中电熊猫液晶显示科技有限公司研发中心

BOE Technology Group Co. Ltd., Beijing 100015,China, E-mail: zhangzhuo@boe..

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China 130033 Postal code：130033
Tel：0431-86176059 Email：yjxs@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰