Analysis and improvement of a larger size TFT-LCD block mura

Xiao-wei LIU; ming TIAN; Liang-liang LI; Yan-qiang FU; Hui-bin Guo; yao LIU; Jian-feng Yuan

doi:10.3788/YJYXS20163111.1033

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Analysis and improvement of a larger size TFT-LCD block mura

Material and Devic | 更新时间：2020-08-12

- Analysis and improvement of a larger size TFT-LCD block mura
- Chinese Journal of Liquid Crystals and Displays Vol. 31, Issue 11, Pages: 1033-1037(2016)
- 作者机构：
  
  福州京东方光电科技有限公司, 福建福州 350000
- 作者简介：
- 基金信息：
- DOI：10.3788/YJYXS20163111.1033
  CLC： TN87
- Received：26 May 2016，
  
  Accepted：12 August 2016，
  
  Published：2016-11
- 稿件说明：
移动端阅览
Xiao-wei LIU, ming TIAN, Liang-liang LI, et al. Analysis and improvement of a larger size TFT-LCD block mura[J]. Chinese journal of liquid crystals and displays, 2016, 31(11): 1033-1037.
DOI：

Xiao-wei LIU, ming TIAN, Liang-liang LI, et al. Analysis and improvement of a larger size TFT-LCD block mura[J]. Chinese journal of liquid crystals and displays, 2016, 31(11): 1033-1037. DOI： 10.3788/YJYXS20163111.1033.

摘要

研究了大尺寸薄膜晶体管液晶显示器产品开发中遇到的一种新的条状显示不均。通过扫描电子显微镜、四探针测试仪和分光光度计设备对这种显示不均进行了分析，这种显示不均与薄膜晶体管阵列基板上的金属配线的膜厚周期性波动有关，金属膜厚的周期性波动导致了液晶显示器的液晶盒盒厚的不均匀，从而造成显示不均。这种膜厚的周期性波动与液晶高世代线广泛采用的平面靶材溅射设备构造有关。通过对设备结构的改造，提高了基板面内的金属膜厚的均一性，改善了此不良。

Abstract

A new unknown block mura of large size TFT-LCD has been studied in this paper. The mura was observed by SEM

Four-probe tester and Spectrophotometer. It is caused by the periodic changing of TFT metal line thickness. The periodic changing of metal line thickness led to the changing of LCD cell gap

influencing display quality of TFT-LCD. The periodic changing metal line thickness is caused by adopting the structure of a kind of flat target magnetron sputter equipment

which is used in large size TFT-LCD production line widely. The thickness uniformity of metal line was improved by modifying the equipment structure. The mura disappeared after the thickness uniformity is improved.

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references

LEE Y H, TANG K H. How human perceptions of Mura affect LCD market values[J]. Displays , 2012, 33(1):46-53.

徐伟,彭毅雯,肖光辉. 未确认Mura分析及改善对策[J]. 液晶与显示,2011,26(5):612-615.

XU W, PENG Y W, XIAO G H. Analysis and improvement of unknown Mura[J]. Chinese Journal of Liquid Crystals and Displays, 2011, 26(5):612-615. (in Chinese)

YOSHIDA Y, KIKUCHI Y, DALY S, et al. 66.3:Invited Paper:image quality improvements in large-screen LC-TV[J]. SID Symposium Digest of Technical Papers, 2005, 36(1):1852-1855.

CHAEG S, SOH H S, LEE W H, et al. Self-passivated copper as a gate electrode in a poly-Si thin film transistor liquid crystal display[J]. Journal of Applied Physics , 2001, 90(1):411-415.

CHOPRAK L. Size effects in the longitudinal magnetoresistance of thin silver films[J]. Physical Review , 1967, 155(3):660-662.

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