Preparation process and field emission properties of globular micron diamond

Jin-hai GAO; Wu-qin ZHANG; Zhen LI; Bin-lin ZHANG

doi:10.3788/YJYXS20163109.0877

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Preparation process and field emission properties of globular micron diamond

Material and Devic | 更新时间：2020-07-07

- Preparation process and field emission properties of globular micron diamond
- Chinese Journal of Liquid Crystals and Displays Vol. 31, Issue 9, Pages: 877-881(2016)
- 作者机构：
  
  1.郑州师范学院物理与电子工程学院, 河南郑州 450044
  2.郑州大学物理工程学院材料物理教育部重点实验室, 河南郑州 450052
- 作者简介：
- 基金信息：
- DOI：10.3788/YJYXS20163109.0877
  CLC： TB383;O484
- Received：14 April 2016，
  
  Accepted：27 May 2016，
  
  Published：2016-09
- 稿件说明：
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Jin-hai GAO, Wu-qin ZHANG, Zhen LI, et al. Preparation process and field emission properties of globular micron diamond[J]. Chinese journal of liquid crystals and displays, 2016, 31(9): 877-881.
DOI：

Jin-hai GAO, Wu-qin ZHANG, Zhen LI, et al. Preparation process and field emission properties of globular micron diamond[J]. Chinese journal of liquid crystals and displays, 2016, 31(9): 877-881. DOI： 10.3788/YJYXS20163109.0877.

摘要

在纯平的陶瓷衬底上面，利用磁控溅射方法镀上一层金属钛。对金属钛层进行表面缺陷处理后，放入微波等离子体化学气相沉积腔中，利用正交实验方法制备出场发射性能最优的薄膜，通过扫描电镜、X射线衍射仪、拉曼光谱仪等仪器

研究了薄膜的微观表面形态、结构组成等，得到了该薄膜是球状微米金刚石薄膜的结论。并进一步研究了最优场发射薄膜的发射机理。

Abstract

A layer of thick metal titanium is plated on the flat ceramic substrate by the method of magnetron sputtering. After processing

the surface defect of metal titanium layer put in the cavity of microwave plasma chemical vapor deposition. Using the method of orthogonal experiment

the thin film of best emission is prepared. By scanning electron microscopy

X-ray diffraction instrument

Raman spectroscopy instrument

the thin film is analyzed. The conclusion of the film is globular micron diamond film. And the film mechanism of field emission is studied.

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references

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Effect of Suffer Layer on Field Emission Properties of Globe-Like Diamond Microcrystalline-Aggregate

Related Author

ZHANG Wu-qin

GAO Jin-hai

Related Institution

College of Electrical Engineering, Zhengzhou University, Zhengzhou 450044, China, E-mail:zhangwuqin@126. com

Department of Physics, Zhengzhou Teachers College

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