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京东方科技集团股份有限公司 技术研发中心 北京,100176
Received:28 December 2015,
Revised:15 January 2016,
Published:05 June 2016
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冯京, 徐传祥, 张方振等. 白色光阻材料在OGS工艺中的应用[J]. 液晶与显示, 2016,31(6): 525-531
FENG Jing, XU Chuan-xiang, ZHANG Fang-zhen etc. Application of white matrix material on one glass solution process for touch panel[J]. , 2016,31(6): 525-531
冯京, 徐传祥, 张方振等. 白色光阻材料在OGS工艺中的应用[J]. 液晶与显示, 2016,31(6): 525-531 DOI: 10.3788/YJYXS20163106.0525.
FENG Jing, XU Chuan-xiang, ZHANG Fang-zhen etc. Application of white matrix material on one glass solution process for touch panel[J]. , 2016,31(6): 525-531 DOI: 10.3788/YJYXS20163106.0525.
分析了白色光阻材料在不同温度、不同厚度和不同化学品浸泡下色度值、分辨率和附着力的变化情况。验证了白色光阻材料在OGS(One glass solution)触摸屏生产中的工艺条件。首先
关注白色光阻材料的光密度值(OD值)、分辨率、耐化性、耐高温性能以及在不同厚度下白色光阻材料的色度变化。然后对白色光阻材料和触摸屏制作工艺进行工艺整合
提出了采用白色光阻加黑矩阵的双层结构
可以保证白色光阻材料的OD值
防止后面的金属线被透视出来
其中白色光阻的厚度控制在15
m
黑矩阵的厚度在1.2
m。在后续的Photo工艺时
调整工艺参数
加大了PR的厚度并加大曝光显影时间
成功解决了这种高段差造成的金属线Open和Remain问题
并采用OGS工艺制作了白色光阻触摸屏样品。
The chromaticity
resolution and adhesion strength of the white matrix materials for touch panel were analyzed at different conditions of temperatures
thickness and chemical solutions. Thus the white matrix materials were verified for one glass solution (OGS) process for touch panel. First
we focused our studies on the optical density (OD) value
resolution
chemical resistance and thermos-stability of the material with different thicknesses. The changes of chromaticity values at different thicknesses were studied. Then
we applied the white matrix material to the OGS touch panel process. In order to ensure the OD value being greater than 4.0 and make metal line on touch panel invisible
we proposed a dual layer structure including white matrix layer and black matrix (BM) layer. The white matrix layer thickness was 15
m and the BM layer thickness was 1.2
m. In the practical photo process
we adjusted the process parameters
such as increasing the photo-resistance thickness
exposure intensity and developing time
and successfully solved the metal open and metal remain problems. In the end
the touch panel with white matrix and BM by OGS technology was demonstrated.
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