Research and realization of BiSS-C protocol encoder interface based on FPGA

WANG Xi-yuan; CHENG Rong; ZHU Yu; SUN Xian

doi:10.3788/YJYXS20163104.0386

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Research and realization of BiSS-C protocol encoder interface based on FPGA

Driving and Controlling | 更新时间：2020-08-12

- Research and realization of BiSS-C protocol encoder interface based on FPGA
- Chinese Journal of Liquid Crystals and Displays Vol. 31, Issue 4, Pages: 386-391(2016)
- 作者机构：
  
  清华大学机械工程系北京,100084
- 作者简介：
- 基金信息：
  
  Surported by National Natural Science Foundation of China(No. 51475261)
- DOI：10.3788/YJYXS20163104.0386
  CLC： TP212.9
- Received：30 September 2015，
  
  Revised：25 December 2015，
  
  Published：05 April 2016
- 稿件说明：
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王希远, 成荣, 朱煜等. 基于FPGA的BiSS-C协议编码器接口技术研究及解码实现[J]. 液晶与显示, 2016,31(4): 386-391

WANG Xi-yuan, CHENG Rong, ZHU Yu etc. Research and realization of BiSS-C protocol encoder interface based on FPGA[J]. , 2016,31(4): 386-391
王希远, 成荣, 朱煜等. 基于FPGA的BiSS-C协议编码器接口技术研究及解码实现[J]. 液晶与显示, 2016,31(4): 386-391 DOI： 10.3788/YJYXS20163104.0386.

WANG Xi-yuan, CHENG Rong, ZHU Yu etc. Research and realization of BiSS-C protocol encoder interface based on FPGA[J]. , 2016,31(4): 386-391 DOI： 10.3788/YJYXS20163104.0386.

摘要

为了满足光刻机工件台超精密运动控制系统对位移测量的需求

本文提出了基于FPGA的BiSS-C协议解码方法

并针对该方法进行了电路设计以及实验验证。首先

研究了BiSS-C协议内容

就其组网方式和帧格式做了详细的介绍。然后

针对绝对式编码器解码要求

利用FPGA拓展性好、灵活性高等特点

通过状态机

设计了绝对式编码器的数据传输电路

实现了BiSS-C协议的译码功能

并采用CLE-AA容栅尺进行了应用验证。最后

进行了与增量式光栅尺的对比校准实验。实验表明

容栅尺绝对式编码器可实现10 kHz的传输速率

运动误差在5

m之内

其可靠性与准确性满足超精密运动控制系统的粗定位要求。

Abstract

In order to meet the displacement measuring requirement of the lithography machine wafer stageultra-precision motion control system

a BiSS-C protocol decoding method has been proposed

which is based on FPGA. The circuit design and experimental verification are carried out as well. Firstly

the BiSS-C protocol is analyzed and its configuration and data frame are presented in detail. Secondly

because of its characteristics of powerfulness and flexibility

FPGA has been used to realize the decoding function. The circuit to transmit the data of absolute encoderis is designed and applied on the CLE-AA grating-shape capacitive encoder. Finally

a comparison with the relative encoder of grating sensor is carried out. Experimental results indicate that the transmit rate of absolute encoder of the capacitive sensor is up to 10 kHz with the error limiting in 5

m. Its accuracy and reliability can satisfy the requirement of ultra-precision motion control system.

关键词

Keywords

references

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