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1. 西安交通大学电子物理与器件教育部重点实验室,陕西 西安,710049
2. 北方民族大学电气信息工程学院,宁夏 银川,750011
Received:18 November 2015,
Revised:17 December 2015,
Published:05 March 2016
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韦海成, 李海燕, 张秀霞. 基于高温制备的氧化钙镁复合薄膜光电特性研究[J]. 液晶与显示, 2016,31(3): 265-269
WEI Hai-cheng, LI Hai-yan, ZHANG Xiu-xia. Photoelectric properties of calcium and magnesium oxide films based on high reaction temperature[J]. , 2016,31(3): 265-269
韦海成, 李海燕, 张秀霞. 基于高温制备的氧化钙镁复合薄膜光电特性研究[J]. 液晶与显示, 2016,31(3): 265-269 DOI: 10.3788/YJYXS20163103.0265.
WEI Hai-cheng, LI Hai-yan, ZHANG Xiu-xia. Photoelectric properties of calcium and magnesium oxide films based on high reaction temperature[J]. , 2016,31(3): 265-269 DOI: 10.3788/YJYXS20163103.0265.
采用电子束蒸镀工艺制备氧化钙掺杂氧化镁复合介质保护膜并深入分析了制备温度对该复合保护膜透过率及二次电子发射效率的影响。实验表明
高温制备能够使复合薄膜表面形貌更为致密
结晶粒径增加
薄膜的透过率和发光效率提高。当制备温度为300℃时
复合薄膜的形貌更为致密平整
裕度从25 V增加到32 V
发光效率从1.70 lm/W提高到1.91 lm/W
提高了12.35%。
The calcium oxide doped magnesium oxide composite dielectric protective film was fabricated by electron beam evaporation. The influence of the fabrication temperature for the secondary electron emission of the composite dielectric protective film is studied. The experimental results show that the film processed by elevated temperature will be more compact
the grain size increases. The luminous efficiency will be improved and the transmittance of the film will be increased. When the processed temperature is 300℃
the formation of the composite film is more dense
the work gas voltage margin raises from 25 V to 32 V
the luminous efficiency increases from 1.70 lm/W to 1.91 lm/W
which is improved by 12.35%.
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夏星,郭滨刚,范玉锋,等.PDP中Mg1-xCaxO复合介质保护膜结晶取向研究[J].真空科学与技术学报,2004,24(5):339-342. XIA X, GUO B G, FAN Y F, et al. Study on preferred orientation of Mg1-xCaxO films in plasma display panel[J]. Chinese Journal of Vacuum Science and Technology, 2004, 24(5):339-342. (in Chinese)
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ZUKAWA T, YOSHINO K, OE Y,et al. 13.5L:Late-News Paper:Development of MgCaO protective layer of plasma display panels for decreased discharge voltage[J]. SID Symposium Digest of Technical Papers, 2012, 43(1):165-167.
段冰,王鹏年,陈富贵,等.H2O+O2气氛下电子束蒸镀制备MgO介质保护膜特性研究[J].真空科学与技术学报,2012,32(3):196-200. DUAN B, WANG P N, CHEN F G, et al. Characterization of MgO protective films deposited by electron evaporation in H2O+O2 atmosphere[J]. Chinese Journal of Vacuum Science and Technology, 2012, 32(3):196-200. (in Chinese)
YAN Q, DENG X Q, LU Z X, et al. 44.1:Invited Paper. High luminous efficacy PDP using CaxMg1-xO protecting layer[J]. SID Symposium Digest of Technical Papers, 2011, 42(1):633-636.
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