Effect of sublimate components on performance of photo spacer in TFT-LCD

XIAO Yu; WANG Dong; JIANG Jing-jing; LI Xiao-guang; YUAN Jian-feng

doi:10.3788/YJYXS20163101.0047

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Effect of sublimate components on performance of photo spacer in TFT-LCD

Material and Device | 更新时间：2020-08-12

- Effect of sublimate components on performance of photo spacer in TFT-LCD
- Chinese Journal of Liquid Crystals and Displays Vol. 31, Issue 1, Pages: 47-51(2016)
- 作者机构：
  
  北京京东方显示技术有限公司北京,100176
- 作者简介：
- 基金信息：
- DOI：10.3788/YJYXS20163101.0047
  CLC： TN141.9
- Received：27 April 2015，
  
  Revised：17 August 2015，
  
  Published Online：17 August 2015，
  
  Published：05 January 2016
- 稿件说明：
移动端阅览
肖宇, 汪栋, 姜晶晶等. TFT-LCD中升华物组分对柱状隔垫物性能的影响[J]. 液晶与显示, 2016,31(1): 47-51

XIAO Yu, WANG Dong, JIANG Jing-jing etc. Effect of sublimate components on performance of photo spacer in TFT-LCD[J]. , 2016,31(1): 47-51
肖宇, 汪栋, 姜晶晶等. TFT-LCD中升华物组分对柱状隔垫物性能的影响[J]. 液晶与显示, 2016,31(1): 47-51 DOI： 10.3788/YJYXS20163101.0047.

XIAO Yu, WANG Dong, JIANG Jing-jing etc. Effect of sublimate components on performance of photo spacer in TFT-LCD[J]. , 2016,31(1): 47-51 DOI： 10.3788/YJYXS20163101.0047.

摘要

为了分析升华物组分对柱状隔垫物性能的影响机制

对目前量产通用的隔垫物材料A和含有升华物组分的隔垫物材料B进行了研究。通过FTIR

3D扫描显微镜

弹性测试和量产测试等方法对隔垫物材料的升华物成分、形貌、力学性能和量产稳定性进行了分析。实验结果表明

添加的升华物组分是一种熔沸点较低的丙烯酸酯单体

相同工艺条件下可以增大隔垫物的顶面面积约1.5m

同时减小其底面面积约1m。但是在大批量产的过程中

会在掩膜板上凝结升华物形成曲面薄膜

增加辅助隔垫物的尺寸和高度。添加的升华物组分可以提高隔垫物的抗压强度

同时可以对应高PPI TFT-LCD产品的开发需求

但是会使低温气泡等不良发生的概率变大。

Abstract

In order to analyze the influencing mechanism of sublimate components on performance of photo spacer

a comparative research between material A of mass production and material B contained sublimate components is studied. By method of FTIR

3D scanning microscope

elasticity test and mass production test

the sublimate components

profile

mechanical property and stability of mass production about photo spacer are analyzed. The experiment results show that the additive sublimate component is a kind of acrylate monomer which has lower melting and boiling point

it can increase about 1.5m of top CD at the same process condition. The acrylate monomer can also decrease about 1m of bottom CD

but it will form sublimate curved film on the mask during the process of mass production

and increase sub photo spacer size and height. The additive sublimate components can improve compressive strength of photo spacer and meet the requirement of high PPI TFT-LCD products

but it will increase the risk of cold bubble.

关键词

Keywords

references

程石,王涛,张敏,等.TFT-LCD中隔垫物密度与Push Mura和低温气泡的关系[J].液晶与显示,2011,26(5):604-607. CHENG S, WANG T, ZHANG M, et al. Relationship of spacer density with Push Mura and cold bubble in TFT-LCD[J]. Chinese Journal of liquid Crystals and Displays, 2011, 26(5):604-607. (in Chinese)

何璇.彩色滤光片用光阻剂的配方及工艺研究[D].北京:北京交通大学,2008. HE X. The formula of photo resist for color filter and its technology[D]. Beijing:Beijing JiaoTong University, 2008. (in Chinese)

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KOO H S, KANG C H, KAWAI T. Study on physical properties of organic resist spacers on color filters[C]. 2007 Digest of Papers Micro processes and Nanotechnology, Kyoto:IEEE, 2007:98-99.

LI D J, HUANG C M, CHOU K C. Deformation analysis on the photospacers for TFT-LCD[C]. Proceedings of ASID'06, New Delhi:SID, 2006:19-22.

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