GOU Chang-hua, WU Ming-zhu, GUO Yong-lin, YANG Yong-qiang, GUAN Xiao-liang, DUAN Yu, WANG Hong-bo. Effects of using InGaZnO without annealing as buffer layer on the performance of InGaZnO thin film transistors[J]. , 2015,30(4): 602-607
GOU Chang-hua, WU Ming-zhu, GUO Yong-lin, YANG Yong-qiang, GUAN Xiao-liang, DUAN Yu, WANG Hong-bo. Effects of using InGaZnO without annealing as buffer layer on the performance of InGaZnO thin film transistors[J]. , 2015,30(4): 602-607 DOI: 10.3788/YJYXS20153004.0602.
Effects of using InGaZnO without annealing as buffer layer on the performance of InGaZnO thin film transistors
Due to the characters of high field effect mobility
good uniformity on large area and amorphous
indium-gallium-zinc-oxide thin film transistors is considered to be a new drive technology for the displays with large size and flexible character.However
the metal contact oxidation between source/drain electrode and active layer will increase the contact resistance and cause performance degradation.IGZO film without annealing has the characters of low oxygen content
more oxygen vacancies and high electrical conductivity.This article proposed using IGZO film without annealing as drain/source electrode buffer layer to reduce the contact oxidation and reduce the contact resistance.Experimental results indicated that the best performance of device can be obtained
when inserting 4 nm IGZO buffer layer
the mobility improved by 11.6% and the threshold voltage reduced 3.8 V compared with the device without buffer layer.In conclusion
the buffer layer can effectively improve the performance of device.In addition
using the same material with active layer as buffer layer can simplify the process compared with other material as buffer layer in industrial production with single rectangular target.
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