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1. 北华大学 物理学院,吉林 吉林,132013
2. 吉林大学 物理学院,吉林 长春,130012
Received:01 March 2014,
Revised:15 April 2014,
Published:25 April 2014
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高丽丽, 徐莹, 张淼, 张跃林, 姚斌. Mg含量对MgZnO薄膜光学性质的影响[J]. 液晶与显示, 2014,29(3): 350-354
GAO Li-li, XU Ying, ZHANG Miao, ZHANG Yue-lin, YAO Bin. Effects of Mg content on the optical properties of MgZnO fims[J]. , 2014,29(3): 350-354
高丽丽, 徐莹, 张淼, 张跃林, 姚斌. Mg含量对MgZnO薄膜光学性质的影响[J]. 液晶与显示, 2014,29(3): 350-354 DOI: 10.3788/YJYXS20142903.0350.
GAO Li-li, XU Ying, ZHANG Miao, ZHANG Yue-lin, YAO Bin. Effects of Mg content on the optical properties of MgZnO fims[J]. , 2014,29(3): 350-354 DOI: 10.3788/YJYXS20142903.0350.
利用射频磁控溅射技术,高纯的氩气作为溅射气体,分别选用不同Mg含量的Mg
x
Zn
1-
x
O
陶瓷靶材,在石英衬底上生长六角纤锌矿结构的Mg
x
Zn
1-
x
O
薄膜,并对薄膜进行了后期热退火处理。研究了Mg含量对Mg
x
Zn
1-
x
O薄膜光学性质的影响。实验结果显示,随着Mg含量的增加,薄膜的带隙变宽;光致发光光谱中近带边发射中心蓝移,近带边紫外发射与可见光区深能级发射强度比值减小,发光质量下降;拉曼光谱仍然保持着ZnO的拉曼振动模式,但随着Mg含量的增加,E
2
high
振动峰逐渐展宽,峰型对称性变差。分析表明,随着Mg的合金化,薄膜中产生了更多的杂质缺陷,结晶质量下降。
Using 99.99% pure argon as sputtering gas
MgZnO films with wurtzite structure were prepared on quartz substrate by radio frequency magnetron sputtering technique with MgZnO targets of different Mg content and then annealed under 10
-4
Pa in a tube furnace.Effects of Mg content on the optical properties of these films were studied. The results indicated that
with the Mg content increasing
the band gap increased and the near-bind-edge emission peaks occured blue shift in room photoluminescence spectra
and the intensity ratio between the ultraviolet near-edge emission and the visible deep energy level emission was reduced
which was accompanied by the decline in the quality of luminance lighting. Raman spectra of Mg
x
Zn
1-
x
O
agreed well with the wurtzite ZnO vibration modes
without any new bands arising from Mg substitution. The E
2
high
Raman peaks were markedly broadened and the symmetry was altered upon Mg substitution. It indicated that the more compositional disorder defects were introduced in the Mg
x
Zn
1-
x
O
films with the increase of Mg content
x
and the quality of crystal degraded.
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