Occurrence and Improvement of Zara Particle in TFT-LCD Cell Process

WANG Hai-cheng; DONG Tian-song; ZHENG Ying-hua; LIU Hua

doi:10.3788/YJYXS20132805.0707

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Occurrence and Improvement of Zara Particle in TFT-LCD Cell Process

Device Physics & Device Technology | 更新时间：2020-08-12

- Occurrence and Improvement of Zara Particle in TFT-LCD Cell Process
- Chinese Journal of Liquid Crystals and Displays Vol. 28, Issue 5, Pages: 707-710(2013)
- 作者机构：
  
  北京京东方显示技术有限公司CELL技术部, 北京 100176
- 作者简介：
- 基金信息：
- DOI：10.3788/YJYXS20132805.0707
  CLC： TN87
- Received：17 January 2013，
  
  Revised：25 March 2013，
  
  Published：15 October 2013
- 稿件说明：
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王海成, 董天松, 郑英花, 刘华. TFT-LCD制程中Zara点状不良的产生与改善研究[J]. 液晶与显示, 2013,28(5): 707-710

WANG Hai-cheng, DONG Tian-song, ZHENG Ying-hua, LIU Hua. Occurrence and Improvement of Zara Particle in TFT-LCD Cell Process[J]. , 2013,28(5): 707-710
王海成, 董天松, 郑英花, 刘华. TFT-LCD制程中Zara点状不良的产生与改善研究[J]. 液晶与显示, 2013,28(5): 707-710 DOI： 10.3788/YJYXS20132805.0707.

WANG Hai-cheng, DONG Tian-song, ZHENG Ying-hua, LIU Hua. Occurrence and Improvement of Zara Particle in TFT-LCD Cell Process[J]. , 2013,28(5): 707-710 DOI： 10.3788/YJYXS20132805.0707.

摘要

研究了TFT-LCD制造工艺中产生Zara Particle的影响因素。采用Mac/Mic

SEM

EDX等检测设备

对Zara点状不良进行了大量的实验测试、数据分析和理论研究工作

对其产生的原因提出了两种不同的理论观点。通过调整聚酰亚胺薄膜厚度和摩擦工艺参数等一系列措施

产品质量得到了很大的提高

Zara点状不良从改善前的21.2%降低到1.69%

大大提高了产品良率

为以后相关问题的研究奠定了一些理论基础。

Abstract

The reason for producing Zara particle in TFT-LCD manufacture process was studied. To solve this difficult point

the experimental tests and data analysis were carried out through macroscopic and microscopic inspection

scanning electron microscope

energy dispersive xray spectrom

etc. Two different viewpoints were put forward. The quality of product is improved by adjusting polyimide thickness

rubbing technological parameter and other measures. The ratio of Zara particle is reduced from 21.2% to 1.69%. Product yield has been greatly improved

and the above-mentioned results provide valuable data and theory basis for related issues in the future.

关键词

Keywords

references

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