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北京真空电子技术研究所 微波电真空器件国家级重点实验室 北京,100015
Received:14 July 2012,
Revised:13 August 2012,
Published:15 October 2013
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丁明清, 李莉莉, 冯进军. MPCVD生长B掺杂金刚石膜的二次电子发射研究[J]. 液晶与显示, 2013,28(5): 688-692
DING Ming-qing, LI Li-li, FENG Jin-jun. Secondary Electron Emission from Boron Doped Diamond Films Grown by MPCVD[J]. , 2013,28(5): 688-692
丁明清, 李莉莉, 冯进军. MPCVD生长B掺杂金刚石膜的二次电子发射研究[J]. 液晶与显示, 2013,28(5): 688-692 DOI: 10.3788/YJYXS20132805.0688.
DING Ming-qing, LI Li-li, FENG Jin-jun. Secondary Electron Emission from Boron Doped Diamond Films Grown by MPCVD[J]. , 2013,28(5): 688-692 DOI: 10.3788/YJYXS20132805.0688.
研究了B掺杂金刚石膜的负电子亲和势(NEA)的行为。对于B
2
H
6
/CH
4
为10 mg/L和2 mg/L的样品
一次电子能量为1 keV时最大二次电子发射系数(SEE)分别达到18.3和10.9。值得注意的是
这两个样品在测试前已在大气中搁置了几个星期
并且测量前未经过任何处理。如此高的SEE表明
样品在大气中暴露后NEA效应仍得到了保留。另外
10 mg/L B
2
H
6
/CH
4
掺杂样品在酸溶液中处理后NEA消失
SEE较低
而在真空中加热后NEA 明显恢复
SEE在1 kV时达到10.2。
Behavior of negative electron affinity (NEA) from B-doped diamond films is investigated. Largest secondary electron emission (SEE) yields were found to be 18.3 and 10.9 at 1 keV primary beam energy for samples doped with 10 mg/L and 2 mg/L B
2
H
6
/CH
4
flow rate ratios
respectively. Note that these samples were left in air for weeks before loaded into SEE system
and subject to no treatment prior to SEE measurements. The higher SEE yields indicate that the NEA effect is well retained though the samples were exposed in air for weeks. Meanwhile
oxidation treatment of the sample doped with 10 mg/L B
2
H
6
/CH
4
flow rate ratio in a boiled acid destroys NEA as evidenced from the lower SEE yields
whereas heating up in vacuum brings NEA back substantially
resulting in a largest yield of 10.2 at 1 keV.
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