This paper analyzed the contact resistance between inkjet-printed silver source/drain (S/D) electrodes and organic semiconductor layer of Organic Thin-film Transistors(OTFTs) using transmission line method(TLM). Spin-coated PVP thin-film and Tips-pentacene thin-film were used as gate dielectric layer and semiconductor layer
respectively. S/D electrodes with four different channel lengths of 200
250
300 m and 400 m were inkjet-printed
and the annealed time of different semiconductor layers was 2 h
6 h and 10 h
respectively. The extracted contact resistances were 8 M
4.5 M and 3 M for OTFTs with three different kinds of annealed time
respectively. Lower contact resistance for OTFTs with annealed time of 10 h can be explained by the fact that longtime annealing can reduce the impurity in the semiconductor layer and lower the contact barrier between electrodes and semiconductor layer.
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Lee S H, Choi M H, Han S H, et al. High-performance thin-film transistor with 6,13-Bis (triisopropylsilylet-hynyl) pentacene by iinkjet printing [J]. Organic Electronics, 2008, 9(5):721-726.[2] Tao C L, Zhang X H, Zhang F J, et al. Solution processed pentacene thin films and their structural properties [J]. Materials Science and Engineering B, 2007, 140(1-2):1-4.[3] Choi M H, Jang J. Effect of SAM layer on bias-stability of inkjet printed TIPS pentacene thin-film transistor [J]. Current Appl. Phys., 2012, 12(1):e6-e9. [4] 洪飞,谭莉,朱棋锋,等,高性能顶栅结构有机薄膜晶体管 [J].液晶与显示,2012,27(3):313-317.[5] 冯魏良,黄培. 柔性显示衬底的研究及进展[J].液晶与显示,2012,27(5):599-607.[6] 陈世琴,陈梦婕,邱龙臻. 石墨烯电极有机薄膜晶体管研究[J].液晶与显示,2012,27(5):595-598.[7] Chung S J, Jang J S, Cho J H, et al. All-inkjet-printed organic thin-film transistors with silver gate, source/drain electrodes [J]. Japanese J. Appl. Phys., 2011,50(3):03CB05(1-5).[8] Peter V N, Michael S S, David J G, et al. Contact resistance extraction in pentacene thin film transistors [J]. Solid-State Electronics, 2003, 47(2):259-262.[9] Chen J H, Chee K T, Max S, et al. Controlled solution deposition and systematic study of charge-transport anisotropy in single crystal and single-crystal textured TIPS pentacene thin films [J]. Organic Electronics, 2009,10(4):696-703.[10] Graciela B B, Fincher C R, Michael L. Contact resistance in organic thin film transistors [J]. Appl. Phys. Lett., 2004, 84(2):296-298.[11] Sung K P, Thomas N J, John E A. High mobility solution processed 6,13-bis(triisopropyl-silylethynyl) pentacene organic thin film transistors [J]. Appl. Phys. Lett., 2007, 91(6):063514(1-3).[12] Rhee S W, Yun D J. Metal-semiconductor contact in organic thin film transistors [J]. J. Materials Chem., 2008, 18: 5437-5444.[13] Chung S J, Jeong J W, Kim D Y,et al. Contact resistance of inkjet-printed silver source-drain electrodes in bottom-contact OTFTs [J]. J. Display Technology, 2012, 8(1):48-53.[14] Choi K N, Kim K S, Chung K S, et al. Solvent effect on the electrical properties of triisopropylsilylethynyl (TIPS) pentacene organic thin-film transistors [J]. Device and Materials Reliability, 2009, 9(3):489-493.[15] Islam M N, Mazhari B. An analytical model for current crowding and source contact resistance in Top-contact organic thin-film transistors [J]. Semiconductor Science and Technology, 2008, 23(12):1-8.
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State Key Laboratory on Integrated Optoelectronics, Jilin University Region, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China