VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry

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VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry

Industrial Technology | 更新时间：2020-09-28

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- VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry
- Chinese Journal of Liquid Crystals and Displays Vol. 35, Issue 10, Pages: 1087-1094(2020)
- 作者机构：
  
  合肥京东方显示技术有限公司, 安徽合肥 230012
- 作者简介：
- 基金信息：
- DOI：10.37188/YJYXS20203510.1087
  CLC： TN873.93;X701.7
- Received：29 April 2020，
  
  Revised：26 May 2020，
  
  Accepted：2020-5-26，
  
  Published：05 October 2020
- 稿件说明：
移动端阅览
Qi GAO, Jian MA, Ji-guo HU, et al. VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry[J]. Chinese journal of liquid crystals and displays, 2020, 35(10): 1087-1094.
DOI：

Qi GAO, Jian MA, Ji-guo HU, et al. VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry[J]. Chinese journal of liquid crystals and displays, 2020, 35(10): 1087-1094. DOI： 10.37188/YJYXS20203510.1087.

摘要

为掌握和了解TFT-LCD行业生产过程中，各工艺环节挥发性有机物（VOCs）的排放特征，以国内某TFT-LCD制造公司为例，研究了各生产车间的VOCs浓度分布。结果表明：阵列生产车间VOCs均值浓度最高，波动范围为4.14~11.19×10

-6

（1~12月）；彩膜（CF）生产车间光刻胶成分比较复杂，绿胶产线VOCs均值浓度最高，为4.6~14.50×10

-6

（1~12月）；阵列和CF车间VCD区域，VOCs浓度最高；降低TFT-LCD生产车间VOCs的浓度关键在于源头控制，投加沸石转轮吸附设备对生产车间VOCs浓度的降低具有很明显的作用，可以去除大约60.71%~71.33%的有机废气。

Abstract

In order to grasp and understand the Volatile Organic Compounds(VOCs)emission characteristics of various process links in the production process of the TFT-LCD industry

a domestic TFT-LCD manufacturing company was selected as an example to study the VOCs concentration distribution of each production workshop. The results showed that the average concentration of VOCs in the Array production workshop was 4.14~11.19×10

-6

in a whole year. The photoresist composition in the CF production workshop was more complex

and the average VOCs concentration of green production line was the highest

which was 4.6~14.50×10

-6

in a whole year. The highest VOCs concentration was found at VCD of Array and CF workshop.The key to reduce the concentration of VOCs in the TFT-LCD production workshop lies in source control. Adding zeolite rotor adsorption equipment had a significant effect on reducing the concentration of VOCs in the production workshop

and could remove about 60.71%~71.33% of organic waste gas.

关键词

Keywords

references

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