Research and improvement of data line and common line invisible short in copper process array substrate

Chen LIN; Yu-chun FENG; Xi CHEN; Gui-quan TANG; Xin LI; He ZHOU; Wen-rui LIU; Xiang-nan YUN

doi:10.37188/YJYXS20203510.1036

您当前的位置：

首页 >

文章列表页 >

Research and improvement of data line and common line invisible short in copper process array substrate

Driving & Controlling | 更新时间：2020-09-28

- Research and improvement of data line and common line invisible short in copper process array substrate
- Chinese Journal of Liquid Crystals and Displays Vol. 35, Issue 10, Pages: 1036-1043(2020)
- 作者机构：
  
  福州京东方光电科技有限公司, 福建福州 350300
- 作者简介：
- 基金信息：
- DOI：10.37188/YJYXS20203510.1036
  CLC： TN873.93
- Received：31 March 2020，
  
  Revised：24 April 2020，
  
  Accepted：24 April 2020，
  
  Published：05 October 2020
- 稿件说明：
移动端阅览
Chen LIN, Yu-chun FENG, Xi CHEN, et al. Research and improvement of data line and common line invisible short in copper process array substrate[J]. Chinese journal of liquid crystals and displays, 2020, 35(10): 1036-1043.
DOI：

Chen LIN, Yu-chun FENG, Xi CHEN, et al. Research and improvement of data line and common line invisible short in copper process array substrate[J]. Chinese journal of liquid crystals and displays, 2020, 35(10): 1036-1043. DOI： 10.37188/YJYXS20203510.1036.

摘要

本文针对铜工艺TFT-LCD制作过程中遇到的不可见的数据信号线和公共电极信号线短路（DCS），提出切割实验方案，精确定位不可见类型的DCS异常的实际位置。基于数据和失效模式分析结果，设计不同灰化工艺时间膜层形貌观察实验，探究发生机理。本文产出的异常发生机理是灰化过程中反应气体SF

残留在“屋檐状”光刻胶下方对公共电极Cu金属造成腐蚀，在产线湿度高的情况下易加剧腐蚀，腐蚀产物向上生长，后续栅极绝缘层/活性层镀膜无法完全覆盖住腐蚀产物，造成源、漏（Source

Drain，SD）层镀膜后数据线与腐蚀产物相连接，最终形成TFT基板膜层正面不可见的DCS异常。依据以上调查结果进行灰化工艺SF

气体用量、产线相对湿度（RH）、灰化工序至2

栅极湿刻工序等待时间和设计相关的改善验证，最终通过量产导入灰化工艺SF

气体用量降低、产线相对湿度（RH）降低、缩短灰化工序至2

栅极湿刻工序等待时间和优化异常发生区域开槽设计以增大间距

等改善措施，大幅减少了不可见类型的DCS异常。

Abstract

Contrapose data line and common line invisible short(DCS Invisible) in production of copper process array substrate

a new method based on cutting for locating the position of DCS Invisible is presented. Based on the result of data and failure analysis

an observation experiment of layer section with different ashing process time is designed to explore the mechanism. In ashing process

reaction gas SF

below the photoresist which looks like the shape of roof will corrode copper metal of common line. Under the condition of high humidity

the corrosion will be aggravated. Corrosion products grow up and can't be covered by thin film of GI/Active. After thin film process of SD(Source

Drain)

the data line will connect with corrosion products and finally cause DCS which is invisible on the front side of array substrate. Based on the research

the experiment of reaction gas consumption of SF

in ashing process

relative humidity

waiting time from Ashing to 2

Gate Wet Etch and design improvement is proceeded. Finally

DCS Invisible is solved by reducing reaction gas consumption of SF

decreasing relative humidity

controlling waiting time from Ashing to 2

Gate Wet Etch and insuring space

of slotting design larger.

关键词

Keywords

references

刘莎 , 王丹 , 杨照坤 , 等 . TFT-LCD技术发展趋势浅析 . 液晶与显示 , 2018 . 33 ( 6 ): 457 - 463 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1378645&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1378645&Fpath=&index=-1&l=zh .

S LIU , D WANG , Z K YANG , 等 . Key technology trends analysis of TFT-LCD . Chinese Journal of Liquid Crystals and Displays , 2018 . 33 ( 6 ): 457 - 463 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1378645&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1378645&Fpath=&index=-1&l=zh .

罗丽平 , 贠向南 , 金基用 . TFT-LCD生产及发展概况 . 现代显示 , 2012 . ( 3 ): 31 - 38 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xdxs201203008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xdxs201203008 .

L P LUO , X N YUN , Y KIMK . The manufacturing and developing of the TFT-LCD . Advanced Display , 2012 . ( 3 ): 31 - 38 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xdxs201203008 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=xdxs201203008 .

C TSAIW , J Y LAI , K Y TU , 等 . A novel barrierless Cu gate for TFT-LCD . SID Symposium Digest of Technical Papers , 2006 . 37 ( 1 ): 1181 - 1184 . DOI: 10.1889/1.2433188 http://doi.org/10.1889/1.2433188 .

张伟 , 陈小英 , 马永生 , 等 . 激光化学气相沉积法在TFT-LCD电路缺陷维修中的应用 . 液晶与显示 , 2019 . 34 ( 8 ): 755 - 763 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1381948&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1381948&Fpath=&index=-1&l=zh .

W ZHANG , X Y CHEN , Y S MA , 等 . Application of laser chemical vapor deposition in repairing TFT-LCD circuit defects . Chinese Journal of Liquid Crystals and Displays , 2019 . 34 ( 8 ): 755 - 763 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1381948&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1381948&Fpath=&index=-1&l=zh .

S H SANAD , A R TAMAN . Corrosion inhibition of copper and carbon steel in white petroleum oil . Surface Technology , 1984 . 23 ( 2 ): 159 - 166 . DOI: 10.1016/0376-4583(84)90122-5 http://doi.org/10.1016/0376-4583(84)90122-5 .

C M CUSANO , J C WANG . Corrosion of copper and lead containing materials by diesel lubricants . Lubrication Engineering , 1995 . 51 ( 1 ): 89 - 95 . http://www.researchgate.net/publication/255034321_Corrosion_of_copper_and_lead_containing_materials_by_diesel_lubricants http://www.researchgate.net/publication/255034321_Corrosion_of_copper_and_lead_containing_materials_by_diesel_lubricants .

韩恒文 , 段庆华 . 含硫添加剂对润滑油铜腐蚀性能的影响 . 石油炼制与化工 , 2013 . 44 ( 4 ): 70 - 74 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=sylzyhg201304014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=sylzyhg201304014 .

H W HAN , Q H DUAN . Effect of S-containing additives in lubricant oil on copper corrosion . Petroleum Processing and Petrochemicals , 2013 . 44 ( 4 ): 70 - 74 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=sylzyhg201304014 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=sylzyhg201304014 .

王嘉敏 , 董佩环 . 铁基合金在六氟化硫中的腐蚀 . 腐蚀与防护 , 1987 . ( 3 ): 2 - 5 . http://www.cnki.com.cn/Article/CJFDTOTAL-FSYF198703000.htm http://www.cnki.com.cn/Article/CJFDTOTAL-FSYF198703000.htm .

J M WANG , P H DONG . Corrosion of iron-base alloy in sulfur hexafluoride . Corrosion and Protection , 1987 . ( 3 ): 2 - 5 . http://www.cnki.com.cn/Article/CJFDTOTAL-FSYF198703000.htm http://www.cnki.com.cn/Article/CJFDTOTAL-FSYF198703000.htm .

齐东梅 , 成若义 , 杜小青 , 等 . Cu及其合金的大气腐蚀研究现状 . 中国腐蚀与防护学报 , 2014 . 34 ( 5 ): 389 - 398 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgfsyfhxb201405001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgfsyfhxb201405001 .

D M QI , R Y CHENG , X Q DU , 等 . Review on atmospheric corrosion of copper and copper alloys . Journal of Chinese Society for Corrosion and Protection , 2014 . 34 ( 5 ): 389 - 398 . http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgfsyfhxb201405001 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgfsyfhxb201405001 .

T SASAKI , J ITOH , Y HORIGUCHI , 等 . Quantitative determination of corrosion products and adsorbed water on copper in humid air containing SO 2 by IR-RAS measurements . Corrosion Science , 2006 . 48 ( 12 ): 4339 - 4351 . DOI: 10.1016/j.corsci.2006.03.016 http://doi.org/10.1016/j.corsci.2006.03.016 .

Views

124

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China 130033 Postal code：130033
Tel：0431-86176059 Email：yjxs@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰