Design of voice-coil deformable mirror and its mechanical characteristics

Xin-yu LIU; Shuo CAO; Dong-ting HU; Wen-chao MA; Zi-yun ZHAO; Jing-jing WU; Hua-xin ZHU; Zhou-ping SU; Yi-xin ZHANG; Li-fa HU

doi:10.37188/YJYXS20203508.0801

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Design of voice-coil deformable mirror and its mechanical characteristics

Materials and Devices | 更新时间：2020-08-11

- Design of voice-coil deformable mirror and its mechanical characteristics
- Chinese Journal of Liquid Crystals and Displays Vol. 35, Issue 8, Pages: 801-807(2020)
- 作者机构：
  
  1.江南大学理学院, 江苏无锡 214122
  2.江苏省轻工光电工程技术研究中心, 江苏无锡 214122
- 作者简介：
- 基金信息：
- DOI：10.37188/YJYXS20203508.0801
  CLC： O753.2
- Received：03 March 2020，
  
  Revised：25 March 2020，
  
  Accepted：25 March 2020，
  
  Published：2020-08
- 稿件说明：
移动端阅览
Xin-yu LIU, Shuo CAO, Dong-ting HU, et al. Design of voice-coil deformable mirror and its mechanical characteristics[J]. Chinese journal of liquid crystals and displays, 2020, 35(8): 801-807.
DOI：

Xin-yu LIU, Shuo CAO, Dong-ting HU, et al. Design of voice-coil deformable mirror and its mechanical characteristics[J]. Chinese journal of liquid crystals and displays, 2020, 35(8): 801-807. DOI： 10.37188/YJYXS20203508.0801.

摘要

针对7单元音圈变形镜的结构进行了设计，对镜面进行了力学分析，并基于有限元ANSYS软件对镜面不同材料及物理参数对最大变形量及镜面应力的影响关系进行了仿真。实验结果表明，所设计的音圈变形镜在镜面具有优良力学特性的条件下，基本满足了变形镜对校正量、影响函数等主要性能指标的要求。仿真结果可以为更多驱动单元数的音圈变形镜提供参考。

Abstract

The structure of 7 actuators VDM is designed

and the mechanical characteristics of its mirror are analyzed based on the finite element method with ANSYS software. The maximum deformation and stress of the VDM under different material and physical parameters are simulated and discussed. The results show that the designed VDM has an outstanding comprehensive performance

and basically meets the requirements of applications. Our simulation results can provide a reasonable reference for the application of VDM.

关键词

Keywords

references

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