Masurement system of LTPS-LCD panel based on evaluation of impurity ion content

Wen-guang DENG; Ye-lu XU; Jian-hui WEN; Bi-qin HUANG; Chang-lian JIN

doi:10.37188/CJLCD.2021-0119

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Masurement system of LTPS-LCD panel based on evaluation of impurity ion content

Display Technology and Applications | 更新时间：2021-09-30

- Masurement system of LTPS-LCD panel based on evaluation of impurity ion content
- Chinese Journal of Liquid Crystals and Displays Vol. 36, Issue 10, Pages: 1388-1394(2021)
- 作者机构：
  
  厦门天马微电子有限公司, 福建厦门 361220
- 作者简介：
- 基金信息：
- DOI：10.37188/CJLCD.2021-0119
  CLC： TN873.93;TB497
- Received：09 April 2021，
  
  Revised：27 May 2021，
  
  Published：2021-10
- 稿件说明：
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Wen-guang DENG, Ye-lu XU, Jian-hui WEN, et al. Masurement system of LTPS-LCD panel based on evaluation of impurity ion content[J]. Chinese journal of liquid crystals and displays, 2021, 36(10): 1388-1394.
DOI：

Wen-guang DENG, Ye-lu XU, Jian-hui WEN, et al. Masurement system of LTPS-LCD panel based on evaluation of impurity ion content[J]. Chinese journal of liquid crystals and displays, 2021, 36(10): 1388-1394. DOI： 10.37188/CJLCD.2021-0119.

摘要

残像是影响液晶显示器（LCD）面板品质的重要因素，残像的不良改善已成为面板工厂持续性研究课题。残像程度与杂质离子的含量正相关，为了实现对低温多晶硅（LTPS）LCD盒内杂质离子含量的监控，本文系统地对LTPS-LCD面板测试盒测量体系进行了研究，并对该测量体系的稳定性、分辨能力进行了探讨。首先针对LTPS技术的面板设计了一种新的测试盒，然后采用液晶电压保持率（Voltage Holding Residual，VHR）评价盒内杂质离子含量，运用测量系统分析方法对其可靠性进行评估，最后通过对比不同紫外线（UV）照射时间与光配向烘烤时间下VHR的变化分析其分辨力。实验结果表明：该测量体系的量具重复性、再现性（Gage R & R%）为10.77%，变异与流程公差（P/T）为26.93%＜30%，可区分数为13＞5，不同批次VHR均值维持在93%~95%，测量结果可靠、稳定，并能有效识别出VHR差异。本文设计的测试盒符合LTPS-LCD面板产业对杂质离子含量监测需求，可为工厂实际生产中杂质离子的监控提供参考。

Abstract

Image sticking is an important factor affecting the quality of liquid crystal display (LCD) panel. The improvement of poor image sticking has been a continuous research topic in LCD panel factory. The degree of image sticking is positively correlated with the content of impurity ions. In order to monitor the content of impurity ions in the LTPS(Low Temperature Poly-Silicon)-LCD cell

the measurement system of the LTPS-LCD panel test cell is systematically studied

and the stability and resolution of the measurement system are discussed. Firstly

the measurement system designes a new test cell for the LTPS technology panel

and then uses voltage holding residual (VHR) to evaluate the impurity ion content in the cell

and the measurement systems analysis (MSA) is used to evaluate the reliability. Finally

the resolution of the measurement system is tested by comparing the changes of VHR under different ultraviolet (UV) irradiation time and photo-alignment baking time. The experimental results show that the measurement system gage repeatability

reproducibility(Gage R & R%) is 10.77%

P/T is 26.93% < 30%

distinguishable score is 13> 5

the measurement results are reliable and stable

and can effectively identify VHR differences. The test cell designed in this paper meets the requirements of the LTPS-LCD panel industry for impurity ion content monitoring

and provides important guidance for monitoring factory impurity ions in actual production.

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Keywords

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