Self-referenced methods for phase calibration of a spatial light modulator

Ru-jia LI; Yun-hui GAO; Liang-cai CAO

doi:10.37188/CJLCD.2021-0046

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Self-referenced methods for phase calibration of a spatial light modulator

Liquid Crystal Spatial Light Modulator and Its Applications | 更新时间：2021-05-28

- Self-referenced methods for phase calibration of a spatial light modulator
- Chinese Journal of Liquid Crystals and Displays Vol. 36, Issue 6, Pages: 854-860(2021)
- 作者机构：
  
  清华大学精密仪器系, 北京海淀 100084
- 作者简介：
- 基金信息：
  
  Supported by National Natural Science Foundation of China(61827825)
- DOI：10.37188/CJLCD.2021-0046
  CLC： TP394.1;TH691.9
- Received：10 February 2021，
  
  Revised：15 March 2021，
  
  Published：2021-06
- 稿件说明：
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Ru-jia LI, Yun-hui GAO, Liang-cai CAO. Self-referenced methods for phase calibration of a spatial light modulator[J]. Chinese journal of liquid crystals and displays, 2021, 36(6): 854-860.
DOI：

Ru-jia LI, Yun-hui GAO, Liang-cai CAO. Self-referenced methods for phase calibration of a spatial light modulator[J]. Chinese journal of liquid crystals and displays, 2021, 36(6): 854-860. DOI： 10.37188/CJLCD.2021-0046.

摘要

相位型空间光调制器（SLM）是一种对光的相位信息进行定量调控的器件。由于制造和使用过程中的一些不确定因素，需要标定SLM的相位调制，即输入灰度和输出相位的响应（LUT）。本文介绍了基于自参考光路的SLM相位调制标定方法。通过在SLM上产生光栅相位，光栅的衍射级次作为参考光，与标定区域的光干涉、形成干涉图。利用傅立叶频谱分析技术和数字全息技术分析干涉图，可分别对SLM的全局LUT和局部LUT进行测量标定。自参考标定方法仅需一个分束器和CMOS即可标定SLM，同时可实现原位标定，是一种简便高效的标定方法。

Abstract

Phase-only spatial light modulator (SLM) modulates the phase of the light quantitatively. Due to the limited manufacture process

the SLM need to be calibrated. The LUT describes the input grayscale and output phase

which represents the modulation. This article introduces the self-referenced calibration method for the SLM. The reference beam is generated from the grating zone. The measured beam carries the modulated phase on the measured zone. The interferograms are made by the self-reference beam. Using the fringes analysis method and digital holography technique

the global and spatial phase modulation of the SLM are measured for calibration. The self-referenced calibration method is compact and easy to align. On-site phase calibration can be carried out with a beam splitter and imaging sensor.

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