Progress in femtosecond laser fabrication of microlens array with spatial light modulators

Hua FAN; Xiao-wen CAO; Zhen-ze LI; Yi WANG; Lei WANG; Ying XU

doi:10.37188/CJLCD.2020-0334

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Progress in femtosecond laser fabrication of microlens array with spatial light modulators

Liquid Crystal Spatial Light Modulator and Its Applications | 更新时间：2021-05-28

- Progress in femtosecond laser fabrication of microlens array with spatial light modulators
- Chinese Journal of Liquid Crystals and Displays Vol. 36, Issue 6, Pages: 827-840(2021)
- 作者机构：
  
  1.清华大学精密仪器系, 北京 100083
  2.中国科学院宁波材料技术与工程研究所, 浙江宁波 315201
  3.吉林大学电子科学与工程学院, 吉林长春 130012
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China(61590930);National Natural Science Foundation of China(61805100);National Natural Science Foundation of China(61827826)
- DOI：10.37188/CJLCD.2020-0334
  CLC： TN249
- Received：09 December 2020，
  
  Revised：14 January 2021，
  
  Published：2021-06
- 稿件说明：
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Hua FAN, Xiao-wen CAO, Zhen-ze LI, et al. Progress in femtosecond laser fabrication of microlens array with spatial light modulators[J]. Chinese journal of liquid crystals and displays, 2021, 36(6): 827-840.
DOI：

Hua FAN, Xiao-wen CAO, Zhen-ze LI, et al. Progress in femtosecond laser fabrication of microlens array with spatial light modulators[J]. Chinese journal of liquid crystals and displays, 2021, 36(6): 827-840. DOI： 10.37188/CJLCD.2020-0334.

摘要

作为最基本的微光学元件，微透镜在多个领域都有非常广泛的潜在应用，然而常见的面向透明硬脆材料微透镜的制备方法效率低下，且对作业环境的要求较高，极大地限制了透明硬脆材料微透镜阵列的大面积制备。空间光调制器作为一种对光场进行调制的设备，可以方便地实现多焦点或者结构化的光场，在光通讯、激光加工等领域具有重要的应用潜力。本文介绍了利用飞秒激光烧蚀结合湿法刻蚀制备硬脆材料微透镜阵列的基本方法，并系统地分析了影响所制备微透镜形貌的关键因素。通过在加工过程中对聚焦光斑的数量和位置进行精细调控，极大地提高了透明硬脆材料微透镜阵列的加工效率，且可以在加工过程中动态地调整飞秒激光烧蚀改性的形貌，从而实现不同尺寸微透镜阵列的高速制备，展现了空间光场调制技术在微光子集成芯片加工领域的应用前景。

Abstract

As a basic micro-optics element

microlens has widespread applications in many fields

whereas the common fabrication methods for microlens compounded from transparent and brittle materials always have a low efficiency and high requirement for environment. Liquid crystal spatial light modulation (SLM) as a light modulation instrument

can realize multi-focus or structured light fields easily

and has important potential application values in optical communication or microfabrication based on ultrafast laser. Herein

a fabrication method is introduced for microlens

which combines the advantages of femtosecond (Fs) laser microfabrication and wetting etch. The key factors influencing the morphology of microlens are analyzed systematically. By introduction of the spatial light field modulation in the femtosecond laser micro/nano fabrication

the number as well as the position of focused spots can be finely controlled

which not only greatly enhances the fabrication efficiency of microlens arrays out of transparent and brittle materials

but also makes it possible to adjust the morphology of femtosecond laser ablation modification dynamically during processing. The application of spatial light field modulation in micro-photonic integrated chip fabrication is well demonstrated.

关键词

Keywords

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