- About Journal
- Articles Online
- For Authors
- For Referees
- 个人中心
- 退出登录
浏览全部资源
扫码关注微信
- About Journal
- Overview
- Editorial Board
- Database Index
- Metrics
- Articles Online
- Online First
- Current Issue
- Archive
- Special Issue
- Virtual Issue
- Recommend
- Download Ranking
- View Ranking
- Cited Ranking
- For Authors
- Guide for Authors
- Data Sharing
- Templates for Authors
- Manusript Process
- Ethics for Authors
- For Referees
- Guide for Referees
- Review Process
- Ethics for Referees
Theoretical model and process parameter analysis of ITO area blackening method for repairing bright spot
- Chinese Journal of Liquid Crystals and Displays Vol. 36, Issue 2, Pages: 246-257(2021)
- 作者机构：
合肥京东方显示技术有限公司, 安徽 合肥 230012
- 作者简介：
- 基金信息：
DOI：10.37188/CJLCD.2020-0213
CLC： TN141.9;TP391.4Received：25 August 2020，
Revised：18 September 2020，
Accepted：18 September 2020，
Published：2021-02
- 稿件说明：
移动端阅览
Guo-dong WU, Lv-hua QIAO, Hai-bin HAN, et al. Theoretical model and process parameter analysis of ITO area blackening method for repairing bright spot[J]. Chinese journal of liquid crystals and displays, 2021, 36(2): 246-257.
Guo-dong WU, Lv-hua QIAO, Hai-bin HAN, et al. Theoretical model and process parameter analysis of ITO area blackening method for repairing bright spot[J]. Chinese journal of liquid crystals and displays, 2021, 36(2): 246-257. DOI： 10.37188/CJLCD.2020-0213.
摘要
本文基于飞秒激光烧蚀机制建立并通过实验验证了ITO区黑化法修复亮点的理论模型，分析了各个工艺参数对修复效果的影响，为亮点不良修复成功率的提升奠定基础。首先通过一系列实验点灯检测、显微镜图片和聚焦离子束（FIB）图片分析结果验证了所创建的修复理论模型；然后利用对比试验分别探究了单脉冲激光单位面积的能量密度
e
、扫描速度
v
、激光频率
f
和光斑大小
a
等工艺参数对ITO区黑化效果的影响；最后为了深入分析ITO区黑化法的烧蚀机理，提出并验证了囊括所有工艺参数的变量"
w
"，成功地为亮点不良修复成功率的提升提供了理论依据。实验结果表明，
a
在4.0~10.0
μ
m，
e
在1.0 mJ/mm
2
以上，
w
在4 250~12 500 mJ/mm
2
时，ITO烧蚀后的黑化效果均达到了暗点标准（≥ 95%），且在点灯条件下未产生其他不良。根据实验结果，将该理论模型和工艺参数分析应用到量产，亮点不良修复成功率达到了95.5%。
Abstract
Based on the ablation mechanism of femtosecond laser
the theoretical model of ITO area blackening method for repairing bright spots was established and verified through experiments
and in order to improve the success ratio of repair
the influence of various process parameters were also analyzed on the remediation effect. In this work
the repair mode was firstly established by a series of experiments with light detection test
microscope images and Focused Ion Beam(FIB) images. Then
process parameters that effect success ratio were analyzed by contrast experiments
and these parameters included the energy density per unit area of single-pulse laser
scanning speed
the laser frequency and sport size. Finally
in order to deeply analyze the ablation mechanism of ITO area blackening method
the variable "
w
" containing all process parameters was proposed and verified
and it successfully provides a theoretical basis for improving the success rate. Experimental results indicated that
when the spot size was 4.0~10.0
μ
m
energy density per unit area of single-pulse laser was 1.0 mJ/mm
2
or more
and the "
w
" was 4 250~12 500 mJ/mm
2
the blackening effect of ITO after repairing was up to the dark point standard and other undesirable phenomenon was not produced. According to the experimental result
the theoretical model and process parameter analysis was applied to mass production
the success rate of bright spot defective repair reached to 95.5%.
关键词
Keywords
references
马 群刚 . TFT-LCD原理与设计 , : 北京 电子工业出版社 , 2011 .
Q G MA . TFT-LCD Principle and Design , : Beijing Publishing House of Electronics Industry , 2011 .
魏 平玉 , 李 涛 , 徐 敏 , 等 . 黑矩阵扩散法修复亮点理论模型及影响因素分析 . 液晶与显示 , 2016 . 31 ( 2 ): 164 - 172 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1707009&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1707009&Fpath=&index=-1&l=zh .
P Y WEI , T LI , M XU , 等 . Model of BM diffusion method and effect actors analysis in bright dot repair . Chinese Journal of Liquid Crystals and Displays , 2016 . 31 ( 2 ): 164 - 172 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1707009&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1707009&Fpath=&index=-1&l=zh .
马 宝平 , 陈 再良 . LCD常见点缺陷的修复 . 苏州大学学报(工科版) , 2009 . 29 ( 4 ): 70 - 72 . DOI: 10.3969/j.issn.1673-047X.2009.04.016 http://doi.org/10.3969/j.issn.1673-047X.2009.04.016 .
B P MA , Z L CHEN . LCD point defect repair . Journal of Suzhou University (Engineering Science Edition) , 2009 . 29 ( 4 ): 70 - 72 . DOI: 10.3969/j.issn.1673-047X.2009.04.016 http://doi.org/10.3969/j.issn.1673-047X.2009.04.016 .
黄 雅纹 , 陈 再良 . TFT LCD常见点缺陷的检测与修复 . 现代电子技术 , 2012 . 35 ( 23 ): 189 - 191 . DOI: 10.3969/j.issn.1004-373X.2012.23.057 http://doi.org/10.3969/j.issn.1004-373X.2012.23.057 .
Y W HUANG , Z L CHEN . Detection and repair of point defects in TFT LCD . Modern Electronics Technique , 2012 . 35 ( 23 ): 189 - 191 . DOI: 10.3969/j.issn.1004-373X.2012.23.057 http://doi.org/10.3969/j.issn.1004-373X.2012.23.057 .
付 国柱 . 玻璃的激光切割技术 . 光机电信息 , 2008 . 25 ( 3 ): 5 - 11 . DOI: 10.3969/j.issn.1007-1180.2008.03.001 http://doi.org/10.3969/j.issn.1007-1180.2008.03.001 .
G Z FU . Technology of cutting glass by laser . OME Information , 2008 . 25 ( 3 ): 5 - 11 . DOI: 10.3969/j.issn.1007-1180.2008.03.001 http://doi.org/10.3969/j.issn.1007-1180.2008.03.001 .
张 威 , 李 国柱 , 王 春明 , 等 . 铝锂合金光纤激光切割的工艺优化与设计 . 中国激光 , 2015 . 42 ( 2 ): 0203003 http://www.cnki.com.cn/Article/CJFDTotal-JJZZ201502013.htm http://www.cnki.com.cn/Article/CJFDTotal-JJZZ201502013.htm .
W ZHANG , G Z LI , C M WANG , 等 . Process optimization and design of fiber laser cutting aluminium-lithium alloy . Chinese Journal of Lasers , 2015 . 42 ( 2 ): 0203003 http://www.cnki.com.cn/Article/CJFDTotal-JJZZ201502013.htm http://www.cnki.com.cn/Article/CJFDTotal-JJZZ201502013.htm .
刘 继展 , 徐 秀琼 , 李 萍萍 . 果实采摘中果梗激光切割分析与实验 . 农业机械学报 , 2014 . 45 ( 1 ): 59 - 64 . DOI: 10.6041/j.issn.1000-1298.2014.01.010 http://doi.org/10.6041/j.issn.1000-1298.2014.01.010 .
J Z LIU , X Q XU , P P LI . Analysis and experiment on laser cutting of fruit peduncles . Transactions of the Chinese Society for Agricultural Machinery , 2014 . 45 ( 1 ): 59 - 64 . DOI: 10.6041/j.issn.1000-1298.2014.01.010 http://doi.org/10.6041/j.issn.1000-1298.2014.01.010 .
秦 苗苗 , 陈 威 , 吴 坚 , 等 . 飞秒激光辅助白内障超声乳化术中激光相关并发症的发生率及其原因 . 眼科新进展 , 2020 . 40 ( 8 ): 747 - 750, 768 . http://www.cnki.com.cn/Article/CJFDTotal-XKJZ202008012.htm http://www.cnki.com.cn/Article/CJFDTotal-XKJZ202008012.htm .
M M QIN , W CHEN , J WU , 等 . Incidence of laser-related complications during femtosecond laser-assisted cataract surgery and its factors . Recent Advances in Ophthalmology , 2020 . 40 ( 8 ): 747 - 750, 768 . http://www.cnki.com.cn/Article/CJFDTotal-XKJZ202008012.htm http://www.cnki.com.cn/Article/CJFDTotal-XKJZ202008012.htm .
刘 钊臣 , 李 锐 , 岳 章显 . 激光光凝治疗糖尿病视网膜病变疗效观察 . 临床眼科杂志 , 2010 . 18 ( 3 ): 244 - 245 .
Z C LIU , R LI , Z X YUE . Therapeutic efficacy of retinal photocoagulation for diabetic retinopathy . Journal of Clinical Ophthalmology , 2010 . 18 ( 3 ): 244 - 245 .
辛 建婷 , 刘 国栋 . 飞秒激光对半导体材料及器件烧蚀效应研究进展 . 激光与光电子学进展 , 2009 . 46 ( 10 ): 64 - 70 . DOI: 10.3788/LOP20094610.0064 http://doi.org/10.3788/LOP20094610.0064 .
J T XIN , G D LIU . Research progress of semiconductor and electrophotonic detector ablation by femtosecond laser . Laser & Optoelectronics Progress , 2009 . 46 ( 10 ): 64 - 70 . DOI: 10.3788/LOP20094610.0064 http://doi.org/10.3788/LOP20094610.0064 .
宋 昶 , 杨 小君 , 赵 卫 , 等 . 基于空间光调制器的飞秒激光深微孔加工方法 . 光子学报 , 2020 . 49 ( 8 ): 0814001 http://www.cqvip.com/QK/93651A/202008/7102539970.html http://www.cqvip.com/QK/93651A/202008/7102539970.html .
C SONG , X J YANG , W ZHAO , 等 . Depth-micro laser drilling methods based on spatial light modulator . Acta Photonica Sinica , 2020 . 49 ( 8 ): 0814001 http://www.cqvip.com/QK/93651A/202008/7102539970.html http://www.cqvip.com/QK/93651A/202008/7102539970.html .
胡 晓冬 , 李 元龙 , 白 少状 , 等 . 激光在材料去除加工中应用的研究进展 . 激光与光电子学进展 , 2020 . 58 ( 5 ): 050001 .
X D HU , Y L LI , S Z BAI , 等 . Research progress of laser application in material removal . Laser & Optoelectronics Progress , 2020 . 58 ( 5 ): 050001 .
金 星 , 孔 剑 , 王 敬强 , 等 . 晶体硅金刚线切割废料制备高纯氮化硅 . 应用化学 , 2018 . 35 ( 11 ): 1364 - 1371 .
X JIN , J KONG , J Q WANG , 等 . Preparation of high-purity silicon nitride from diamond-wire cutting waste . Chinese Journal of Applied Chemistry , 2018 . 35 ( 11 ): 1364 - 1371 .
刘 丹枫 , 丁 明明 , 张 丽丽 , 等 . 热场效应下聚酰亚胺纤维力学性质有限元分析 . 应用化学 , 2020 . 37 ( 2 ): 190 - 197 . http://yyhx.ciac.jl.cn/CN/abstract/abstract17399.shtml http://yyhx.ciac.jl.cn/CN/abstract/abstract17399.shtml .
D F LIU , M M DING , L L ZHANG , 等 . Finite element analysis of mechanical properties of polyimide fiber under thermal field . Chinese Journal of Applied Chemistry , 2020 . 37 ( 2 ): 190 - 197 . http://yyhx.ciac.jl.cn/CN/abstract/abstract17399.shtml http://yyhx.ciac.jl.cn/CN/abstract/abstract17399.shtml .
魏平玉, 韩磊, 郭栋, 等.金属线的修复设备: 中国, CN204215119U[P].2015-03-18.
WEI P Y, HAN L, GUO D, et al . Metal wire repair equipment: CN, CN204215119U[P]. 2015-03-18. (in Chinese)
朱 世楠 , 李 楠 . AMOLED亮点不良修复方法 . 液晶与显示 , 2020 . 35 ( 3 ): 198 - 204 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1455858&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1455858&Fpath=&index=-1&l=zh .
S N ZHU , N LI . Method of repairing AMOLED's bright pixel defect . Chinese Journal of Liquid Crystals and Displays , 2020 . 35 ( 3 ): 198 - 204 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1455858&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1455858&Fpath=&index=-1&l=zh .
乔 律华 , 刘 涛 , 李 俊峰 , 等 . Trimmer工艺参数对切割效果的影响 . 液晶与显示 , 2018 . 33 ( 8 ): 661 - 668 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1379160&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1379160&Fpath=&index=-1&l=zh .
L H QIAO , T LIU , J F LI , 等 . Effect of trimmer process parameters on trimming result . Chinese Journal of Liquid Crystals and Displays , 2018 . 33 ( 8 ): 661 - 668 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1379160&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1379160&Fpath=&index=-1&l=zh .
韩 磊 , 魏 平玉 , 周 春霖 , 等 . 晕开不良修复方法及影响因素的研究 . 液晶与显示 , 2017 . 32 ( 2 ): 110 - 116 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1357838&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1357838&Fpath=&index=-1&l=zh .
L HAN , P Y WEI , C L ZHOU , 等 . Particle gap repair method and effect actors analysis . Chinese Journal of Liquid Crystals and Displays , 2017 . 32 ( 2 ): 110 - 116 . http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1357838&Fpath=&index=-1&l=zh http://cjlcd.lightpublishing.cn/thesisDetails?columnId=1357838&Fpath=&index=-1&l=zh .
刘 黎明 , 杨 培志 , 莫 镜辉 . I TO靶材黑化物的X射线光电子能谱研究 . 光学与光电技术 , 2009 . 7 ( 5 ): 84 - 86 . DOI: 10.3969/j.issn.1672-3392.2009.05.023 http://doi.org/10.3969/j.issn.1672-3392.2009.05.023 .
L M LIU , P Z YANG , J H MO . Investigation on the blackened matter on ITO target using XPS . Optics & Optoelectronic Technology , 2009 . 7 ( 5 ): 84 - 86 . DOI: 10.3969/j.issn.1672-3392.2009.05.023 http://doi.org/10.3969/j.issn.1672-3392.2009.05.023 .
邓素辉.激光与物质相互作用的热效应研究[D].南昌: 江西师范大学, 2006.
DENG S H.Study on the thermal effect in the interaction of the laser radiation with matter[D]. Nanchang: Jiangxi Normal University, 2006. (in Chinese)
0
Views
115
下载量
1
CSCD
- L-PDFDownload
- Meta-XMLDownload
- BibTeXDownload
- EndnoteDownload
- RefMan Download
- NoteExpressDownload
- NoteFirstDownload
Publicity Resources
Related Articles
Related Author
Related Institution
AI问答- Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China 130033 Postal code：130033
- Tel：0431-86176059 Email：yjxs@ciomp.ac.cn
- Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17
京公网安备11010802024621 - It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
- Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
