Narrow black matrix for TFT-LCD

JIN Fu-jiang; LU Bing; ZHU Feng-zhi; LUO Feng; LIU Xing; DAI Wei-nan; LIU Hua; Fan Jun

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Narrow black matrix for TFT-LCD

更新时间：2020-08-12

- Narrow black matrix for TFT-LCD
- Chinese Journal of Liquid Crystals and Displays Vol. 29, Issue 4, Pages: 521-526(2014)
- 作者机构：
  
  成都京东方光电科技有限公司,四川成都,611731
- 作者简介：
- 基金信息：
- DOI：
  CLC： TK730.2
- Received：29 September 2013，
  
  Revised：11 October 2013，
  
  Published Online：25 November 2013，
  
  Published：05 August 2014
- 稿件说明：
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靳福江, 卢兵, 朱凤稚, 罗峰, 柳星, 代伟男, 刘华, 范峻. 新型TFT-LCD黑矩阵的细线化研究[J]. 液晶与显示, 2014,29(4): 521-526

JIN Fu-jiang, LU Bing, ZHU Feng-zhi, LUO Feng, LIU Xing, DAI Wei-nan, LIU Hua, FAN Jun. Narrow black matrix for TFT-LCD[J]. , 2014,29(4): 521-526
靳福江, 卢兵, 朱凤稚, 罗峰, 柳星, 代伟男, 刘华, 范峻. 新型TFT-LCD黑矩阵的细线化研究[J]. 液晶与显示, 2014,29(4): 521-526 DOI：

JIN Fu-jiang, LU Bing, ZHU Feng-zhi, LUO Feng, LIU Xing, DAI Wei-nan, LIU Hua, FAN Jun. Narrow black matrix for TFT-LCD[J]. , 2014,29(4): 521-526 DOI：

摘要

介绍了新型TFT-LCD黑矩阵细线化研究。在原有工艺设备的基础上，突破设备局限和工艺瓶颈，通过引入相掩膜技术和背面曝光设备，达到进一步减小黑矩阵线宽的效果。实验测试结果显示：在普通掩膜板设计上应用相位移掩膜板技术，降低透光区边缘衍射和散射现象，使曝光后黑矩阵线宽降低1.0~1.5 m。在原有工艺基础上添加背面曝光工艺，使黑矩阵材料在显影后进行背面曝光预固化，改善黑矩阵图形形貌，进一步减小黑矩阵线宽达到0.3~0.5 m。通过新工艺和新设备的引入和应用，黑矩阵线宽整体降低1.5~2.0 m，达到5.0~5.5 m，可以满足目前高PPI（单位面积像素个数）产品对透过率和对比度要求。

Abstract

The new study of black matrix thinner for TFT-LCD was presented in this paper. Based on the normal process technology

breaking through the limits of equipments and process bottlenecks

the affection of thinner black matrix critical dimension was worked out by adding phase shift mask and back exposure. The results show that black matrix critical dimension could be reduced 1.0~1.5 m by applied on phase shift mask that decreased the diffraction of transmission edge area. Because the back exposure technology could cure the black matrix material

the black matrix critical dimension was reduced 0.3~0.5 m. By the new technology and equipment applied

the black matrix critical dimension was decreased 1.5~2.0 m at total

which meets the requirements of high quality transmit and contrast.

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references

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