Cover glass for OLED encapsulation was made by wet etching technology. The impact of concentration of hydrofluoric acid
temperature
ultrasound and reactant on thickness and surface smoothness was studied. The best method to make cover glass was obtained: In the ultrasonic cleaner
the concentration of hydrofluoric acid was 40%
corrosion time was 15 min and the corrosion process cleared the reactant
then we got 0.177 mm smooth surface cover glass
which was coincident with the encapsulation standard of organic electroluminescent devices. Organic Light-Emitting Diodes were encapsulated using cover glass made by this method in a nitrogen atmosphere
the attenuation rate of luminance of these devices can be slowed down.
Carcia P F,McLean R S, Reilly M H. Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers [J].Appl. Phys. Lett., 2006,89(3): 031915(1-3).
Iliescu C,Jing J,Tay F EH, et al. Characterization of masking layers for deep wet etching of glass in an improved HF/HClsolution [J].Surface & Coatings Technology, 2005,198:314-318.