A new photo-spacer applied in TFT-LCD production was introduced. This material not only could withstand greater deformation
but had a higher recovery rate than other material. Compared with the mass production material
it showed better heat tolerance at 230℃ for 20 min and its height reduction ratio was 3.04%. It also showed little dependent on column Spacer height in rubbing processes under the same production condition.
Chen S H, Koo H S, Chen W Y, et al. Advanced photo spacer technology for large-sized TFT-LCD //SID Symposium Digest, Boston:SID, 2005, 36: 539-541.
Cho Jung-Hyuk, Sohn Jung-Min. Improvement of column spacer uniformity in a TFT LCD panel [J]. J. Korean Physical Society, 2006, 48(2):240-245.
Koo H S, Kang C H. Study on physical properties of organic resist spacers on color filters //Microprocesses and Nanotechnology, 2007 Digest of Papers, Kyoto:The Japan Society of Applied Physics and IEEE Electron Device Society,2007: 98-99.
Li De-Jiun, Huang Chun-Ming, Chou Kuo-Ching. Deformation Analysis on the Photospacers for TFT LCD //Proc. of ASID06, New Delhi:SID, 2006: 19-22.