ZHAO Hai-li, JIANG Hui-lin, WANG Xiao-man, LIU Zhi. Dynamic Light-Adjusting Technology of High Frame Frequency CCD Camera in Space Optical Communication System[J]. , 2012,(2): 267-270
ZHAO Hai-li, JIANG Hui-lin, WANG Xiao-man, LIU Zhi. Dynamic Light-Adjusting Technology of High Frame Frequency CCD Camera in Space Optical Communication System[J]. , 2012,(2): 267-270DOI:
Study on ITO Etching in FFS structure with resin material
The Acrylate resin layer has lower dielectric constant(ε≈3.5)
better optical transparency
and can be spin coated as a flat surface film easily. By using resin as passivaion layer in the array process
we make it increase the vertical gap between the Common ITO and bus line and plannar the devices. This reduces unwanted capacitive coupling and enables the pixel electrode to be extended over the gate and data lines
thus increasing aperture area
specifically decreases power. In this work
there were some problems between the resin passivation layer and pixel ITO
such as Mo attack
missing ITO and so on. After optimizing the process of ITO Etching
photosensitive resin and non-photosensitive resin perfectly match with ITO etchant and Resin Coating
we stressfully has applied the resin passivation layer to the TFT -LCD.