Silicon Nitride Materials Applied in Touch Sensor

QU Lian-jie; CHEN Xu; GUO Jian; MIN Tae-yup; XIE Zhen-yu; ZHANG Wen-yu

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Silicon Nitride Materials Applied in Touch Sensor

Material Physics & Chemistry | 更新时间：2020-08-12

- Silicon Nitride Materials Applied in Touch Sensor
- Chinese Journal of Liquid Crystals and Displays Vol. 27, Issue 2, Pages: 466-470(2012)
- 作者机构：
  
  北京京东方光电科技有限公司
- 作者简介：
  
  [ "" ]
- 基金信息：
- DOI：
  CLC： TN27;O433.3;TN141.9
- Received：24 February 2012，
  
  Revised：25 April 2012，
  
  Published Online：20 August 2011，
  
  Published：15 April 2012
- 稿件说明：
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曲连杰, 陈旭, 郭建, 闵泰烨, 谢振宇, 张文余. 氮化硅在触摸屏中的应用分析[J]. 液晶与显示, 2012,27(2): 466-470

QU Lian-jie, CHEN Xu, GUO Jian, MIN Tae-yup, XIE Zhen-yu, ZHANG Wen-yu. Silicon Nitride Materials Applied in Touch Sensor[J]. 液晶与显示, 2012,27(2): 466-470
曲连杰, 陈旭, 郭建, 闵泰烨, 谢振宇, 张文余. 氮化硅在触摸屏中的应用分析[J]. 液晶与显示, 2012,27(2): 466-470 DOI：

QU Lian-jie, CHEN Xu, GUO Jian, MIN Tae-yup, XIE Zhen-yu, ZHANG Wen-yu. Silicon Nitride Materials Applied in Touch Sensor[J]. 液晶与显示, 2012,27(2): 466-470 DOI：

摘要

研究了氮化硅材料在触摸屏领域中的应用

利用等离子体化学气相沉积技术

在一定厚度的玻璃表面沉积不同厚度的氮化硅薄膜。通过理论分析和试验测试的方法得到了氮化硅膜层厚度和折射率对触摸屏透过率以及表面宏观颜色的影响。分析结果表明

氮化硅膜层折射率对触摸屏的平均透过率影响明显

而膜层厚度对触摸屏的平均透过率影响很小

但是膜层厚度的改变对触摸屏特定波长处透过率和膜层宏观颜色影响很明显。在实际生产中可以通过改变沉积条件获得合适折射率及厚度的氮化硅薄膜材料。

Abstract

Material Physics & Chemistry

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references

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