Growth and Properties of Transparent Conducting ZnO : Ti Films by DC Magnetron Sputtering at Low Temperature

LIU Han-fa; ZHANG Hua-fu; YUAN Yu-zhen; YUAN Chang-kun; LEI Cheng-xin

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Growth and Properties of Transparent Conducting ZnO : Ti Films by DC Magnetron Sputtering at Low Temperature

Device Technology & Physics | 更新时间：2020-08-12

- Growth and Properties of Transparent Conducting ZnO : Ti Films by DC Magnetron Sputtering at Low Temperature
- Chinese Journal of Liquid Crystals and Displays Vol. 24, Issue 6, Pages: 823-826(2009)
- 作者机构：
  
  山东理工大学理学院,山东淄博 255049,E-mail:liuhanfa@126.com
- 作者简介：
- 基金信息：
- DOI：
  CLC： O484.1
- Received：08 May 2009，
  
  Revised：02 January 1900，
  
  Published Online：30 December 2009，
  
  Published：30 December 2009
- 稿件说明：
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刘汉法;张化福;袁玉珍;袁长坤;类成新. 直流磁控溅射法低温制备ZnO : Ti 透明导电薄膜及特性研究[J]. 液晶与显示, 2009,24(6): 823-826

LIU Han-fa;ZHANG Hua-fu;YUAN Yu-zhen;YUAN Chang-kun;LEI Cheng-xin. Growth and Properties of Transparent Conducting ZnO : Ti Films by DC Magnetron Sputtering at Low Temperature[J]. 液晶与显示, 2009,24(6): 823-826
刘汉法;张化福;袁玉珍;袁长坤;类成新. 直流磁控溅射法低温制备ZnO : Ti 透明导电薄膜及特性研究[J]. 液晶与显示, 2009,24(6): 823-826 DOI：

LIU Han-fa;ZHANG Hua-fu;YUAN Yu-zhen;YUAN Chang-kun;LEI Cheng-xin. Growth and Properties of Transparent Conducting ZnO : Ti Films by DC Magnetron Sputtering at Low Temperature[J]. 液晶与显示, 2009,24(6): 823-826 DOI：

摘要

利用直流磁控溅射法在室温水冷玻璃衬底上制备出了可见光透过率高、电阻率低的掺钛氧化锌(ZnO ∶ Ti)透明导电薄膜。SEM和XRD研究结果表明

ZnO ∶ Ti薄膜为六角纤锌矿结构的多晶薄膜

且具有

轴择优取向。厚度为437 nm薄膜的电阻率为1.7310

-4

cm。所制备薄膜具有良好的附着性能

薄膜样品在500~800 nm的可见光平均透过率都超过了91％。

Abstract

Transparent conducting titanium-doped zinc oxide films with high transparency and relatively low resistivity have been successfully prepared by DC magnetron sputtering at room temperature. SEM and XRD studies revealed that all the films were polycrystalline with a hexagonal structure and a preferred orientation along the

-axis. The resistivity achieved was 1.7310

-4

cm at a thickness of 437 nm.All the films present a high transmittance of above 91% in the visible range.

关键词

Keywords

references

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Related Author

GUO Mei-xia

LIU Han-fa

ZHANG Hua-fu

LEI Cheng-xin

YUAN Yu-zhen

YUAN Chang-kun

LIU Han-fa

Related Institution

School of Science, Shandong University of Technology

School of Physics and Optic-Electronic Information Technology, Shandong University of Technology, Zi'bo

School of Physics and Optic-Electronic Information, Shandong University of Technology, Zibo 255049, China, E-mail:huabaozhang@126.

Jilin Normal University

Key Laboratory for Comprehensive Energy Saving of Cold Regions Architecture of Ministry of Education, Jilin Jianzhu University

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