Application of Non-Contact Air-Suspended Movement Technology in Semiconductor and FPD Production Industry

WANG Tao; YANG Yu-gui; PENG Guang-zheng

doi:null

您当前的位置：

首页 >

文章列表页 >

Application of Non-Contact Air-Suspended Movement Technology in Semiconductor and FPD Production Industry

Device Technology & Physics | 更新时间：2020-08-12

- Application of Non-Contact Air-Suspended Movement Technology in Semiconductor and FPD Production Industry
- Chinese Journal of Liquid Crystals and Displays Vol. 24, Issue 3, Pages: 404-408(2009)
- 作者机构：
  
  1. 北京理工大学自动化学院,北京 100081,E-mail:wangtaobit@bit.edu.cn
  2. 空军95949部队,河北沧州 061036
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM285;TP211+.32
- Received：16 December 2008，
  
  Revised：02 January 1900，
  
  Published Online：30 June 2009，
  
  Published：30 June 2009
- 稿件说明：
移动端阅览
王涛;杨玉贵;彭光正. 半导体及平板显示制造业中的空气非接触搬运技术[J]. 液晶与显示, 2009,24(3): 404-408

WANG Tao;YANG Yu-gui;PENG Guang-zheng. Application of Non-Contact Air-Suspended Movement Technology in Semiconductor and FPD Production Industry[J]. 液晶与显示, 2009,24(3): 404-408
王涛;杨玉贵;彭光正. 半导体及平板显示制造业中的空气非接触搬运技术[J]. 液晶与显示, 2009,24(3): 404-408 DOI：

WANG Tao;YANG Yu-gui;PENG Guang-zheng. Application of Non-Contact Air-Suspended Movement Technology in Semiconductor and FPD Production Industry[J]. 液晶与显示, 2009,24(3): 404-408 DOI：

摘要

介绍了空气非接触搬运技术的优越性、发展现状及其在半导体器件和平板显示制造业中的应用

阐述了空气悬浮和吸浮式非接触技术的原理

讨论了空气非接触搬运技术中存在的关键问题及解决方案

分析了该技术的发展前景。

Abstract

The connotation and the application in the semiconductor and FPD production industry of non-contact air-suspended movement technology were introduced. The non-contact air-suspended movement technology principles including air float and suck float were explained. The important questions in the non-contact air-suspended movement technology and the solutions were discussed. The development foreground of the non-contact air-suspended movement technology was analyzed.

关键词

Keywords

references

. 罗清岳.非接触性大型玻璃基板搬运技术 [J]. 国际光电与显示 ,2007,(6):61-63.

. Kasuya Yosuke.The latest trends of semiconductor/FPD material handling system:daiichi institution Industry:Air-surfacing non-contact panel handling system [J].Semicond. FPD World,2006,25(9):68-69(in Japanese).

. New Way Bearings Company.New Way Precision,Air Bearing Application Guide . Aston,USA:New Way Bea-ring Company, 2003.

. 第一设施設公業.LCD工場,半導體工場對応する基板サイズガ大きくなゐはど優位性が際立っ新型搬送技術 .(株)テクノアソシエツ. .http://openlab-air.jp/articles/magicmove20060517.html.

. 崎野茂夫.基礎研究をいかに実用製品に結び付けたか [J].Machine Design & Tribology, 2002,(21):2.

. 门连通,白淑璠.非接触式搬运设备在液晶物流中的应用 [J]. 物流技术 ,2006,(5):27-29.

. Solar Research Laboratory Ltd.Bernoulli chuck for micro wafer chip . .http://www.solarlab.co.jp/tipeng/tipeng_001.htm.

. Li Xin,Kawashima Kenji,Kagawa Toshiharu.Modeling of non-contact handling device by using air swirling flow // Proceeding of 6th EUROSIM Congress on Modelling and Simulation,Ljubljana,Slovenia:Slovejan Society for Modelling and Simulation SLOSIM and Ljubljana Faculty of Electrical Engineering,2007.

. 孙雅洲,卢泽生,饶河清.基于FLUNENT软件的多孔质静压轴承静态特性的仿真与实验研究 [J]. 机床与液压 ,2007,35(3):170-172.

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China 130033 Postal code：130033
Tel：0431-86176059 Email：yjxs@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰