SHAO Jing-zhen;DONG Wei-wei;TAO Ru-hua;DENG Zan-hong;Fang Xiao-dong;. Preparation and Development of Transparent Conductive Oxide Films on Flexible Substrates[J]. 液晶与显示, 2009,24(5): 675-680
SHAO Jing-zhen;DONG Wei-wei;TAO Ru-hua;DENG Zan-hong;Fang Xiao-dong;. Preparation and Development of Transparent Conductive Oxide Films on Flexible Substrates[J]. 液晶与显示, 2009,24(5): 675-680DOI:
Preparation and Development of Transparent Conductive Oxide Films on Flexible Substrates
Flexible transparent conductive oxide films have become a focus of research because of some unique advantages
such as light weight
flexibility
cost effective
etc.
They are widely used in plastic liquid crystal display
flexible solar cell and unbreakable heat reflecting mirror. In this paper
the preparation techniques of flexible transparent conductive oxide films were reviewed. The advantages and disadvantages of the preparation techniques were analyzed. The treatments of flexible substrates were discussed. Finally
the application fields and future development of flexible transparent conductive oxide films are suggested.
关键词
Keywords
references
. Badeker K. Electrical conductivity and thermo-electromotive force of some metallic ampounds [J]. Ann. Phys., (Leipzip), 1907, 22(4): 749-766.
. etinrgü E. Characteristics of filtered vacuum arc deposited ZnO-SnO2 thin films on room temperature substrates [J]. Optics Communications, 2007, 280(1):114-119.
. Chang S C, Shiao M H. Smooth indium zinc oxide film prepared by sputtering a In2O3 : ZnO =95 : 5 target [J]. Microelectronics J., 2007, 38(12): 1202-1206.
. Kumar K, Ramamoorthy K, Koinkar P M, et al. A novel in situ synthesis and growth of ZnAl2O4 thin films [J]. J. Crystal Growth, 2006, 289(1):405-407.
. Abrutis A, Valincius G, Baltrunas G, et al. Spray-pyrolysis Cd2SnO4 films for electrochemical applications [J]. Thin Solid Films, 2007, 515(17): 6817-6823.
. Yang F F, Fang L, Zhang S F, et al. Optical properties of CdIn2O4 thin films prepared by DC reactive magnetron sputtering [J]. J. Crystal Growth, 2006, 297(2): 411-418.
. Neumann-Spallart M, Pai S P, Pinto R. PLD growth of CuAlO2 [J]. Thin Solid Films, 2007, 515(24):8641-8644.
. Varadarajan V, Norton D P, Budai J D. Phase stability and orientation of SrCu2O2 films grown by pulsed laser deposition [J]. Thin Solid Films, 2005, 488 (1-2):173-177.
. Kim H, Pique A, Horwitz J S, et al. Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices [J]. Thin Solid Films, 2000, 377-378 (1): 798-802.
. Reddy K T R, Reddy T B S, Forbes I, et al. Highly oriented and conducting ZnO:Ga layers grown by chemical spray pyrolysis [J]. Surface and Coatings Technology, 2002, 151-152 (1):110-113.
. Ma H L, Hao X T, Ma J, et al. Bias voltage dependence of properties for ZnO:Al films deposited on flexible substrate [J]. Surface and Coatings Technology, 2002, 161(1): 58-61.
. Pei Z L, Zhang X B, Zhang G P, et al. Transparent conductive ZnO:Al thin films deposited on flexible substrates prepared by direct current magnetron sputtering [J]. Thin Solid Films, 2006, 497(1-2): 20-23.
. Kim S, Lee W, Lee C. Influence of ZnO buffer layer thickness on electrical and optical properties of GZO thin films deposited on polymer substrates [J]. Materials Science and Technology, 2007, 23(3): 303-306.
. Chiou B S, Hsieh S T. R.f. magnetron-sputtered indium tin oxide film on a reactively ion-etched acrylic substrate [J]. Thin Solid Films, 1993, 229(2): 146-155.
. Fan J C C. Preparation of Sn-doped In2O3(ITO) films at low deposition temperatures by ion-beam sputtering [J]. Appl. Phy. Lett., 1979, 34(8): 515-517.
. Yang T L, Zhang D H, Ma J, et al. Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering [J]. Thin Solid Films, 1998, 326(1-2): 60-62.
. Lee K-I, Kim E K, Kim H-D, et al. Low temperature Al doped ZnO films on a flexible substrate by DC sputtering [J]. Phys. Stat. Sol.(C), 2008, 5(10):3344- 3347.
. Kim H, Horwitz J S, Kusgto G P, et al. Indium tin oxide thin films grown on flexible plastic substrates by pulsed-laser deposition for organic light-emitting diodes [J]. Appl. Phys. Lett., 2001, 79(3): 284-286.
. Asakuma N, Imai H, Fukui T, et al. Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates [J]. J. Sol-Gel Science and Technology, 2003, 27(1):91-95.
. Chung W, Thompson M O, Wickboldt P, et al. Room temperature indium tin oxide by XeCl excimer laser annealing for flexible display [J]. Thin Solid Films, 2004, 460(1-2): 291-294.